Which ETFs hold Axcelis Technologies Inc?

104 thematic and core ETFs hold Axcelis Technologies Inc, by holdings dated Jun 30, 2026 to Nov 3, 2026. The largest positions are TINY at 3.59% of the fund on Nov 3, 2026, PSCT at 1.36% of the fund on Nov 3, 2026 and SPIT at 1.20% of the fund on Aug 31, 2026. 1 single-stock and leveraged fund and 1 income and other fund on it are listed apart.

Company · ACLS · listed in US

ETFs that hold Axcelis Technologies Inc

Share on X Download as PDF

104 thematic and core ETFs hold Axcelis Technologies Inc, by holdings dated Jun 30, 2026 to Nov 3, 2026. TINY holds the most, at 3.59% of the fund on Nov 3, 2026. The next largest are PSCT (1.36%) and SPIT (1.20%).

askIQ about this page

askIQ about Axcelis Technologies Inc

1 single-stock and leveraged fund and 1 income and other fund on it are listed below.

Look up another company askIQ about who holds ACLS

Share of each fund · one bar per fund, largest first

TINY 3.59%104 fundsDXUV <0.01%

funds above 10%

0.10%

median share

101

funds under 1%

Thematic and core funds that hold it

104 funds

50 of 104 · click a column to sort

ETFs that hold Axcelis Technologies Inc
#	Fund	Name	Share of the fund ↓	Holdings filed	Asset
1	TINY	ProShares Nanotechnology ETF	3.59%	Nov 3, 2026	Equity
2	PSCT	Invesco S&P SmallCap Information Technology ETF	1.36%	Nov 3, 2026	Equity
3	SPIT	F/m Emerald Special Situations ETF	1.20%	Aug 31, 2026	Equity
4	FLQS	Franklin U.S. Small Cap Multifactor Index ETF	0.79%	Jun 30, 2026	Equity
5	JSML	Janus Henderson Small Cap Growth Alpha ETF	0.66%	Jul 31, 2026	Equity
6	FFSM	Fidelity Fundamental Small-Mid Cap ETF	0.63%	Jul 31, 2026	Equity
7	NIXT	Research Affiliates Deletions ETF	0.63%	Jun 30, 2026	Equity
8	XSHQ	Invesco S&P SmallCap Quality ETF	0.63%	Nov 3, 2026	Equity
9	PSC	Principal U.S. Small-Cap ETF	0.55%	Jun 30, 2026	Equity
10	AFSM	First Trust Active Factor Small Cap ETF	0.42%	Nov 3, 2026	Equity
11	IVSS	Applied Finance IVS US SMID ETF	0.41%	Jun 30, 2026	Equity
12	AFMC	First Trust Active Factor Mid Cap ETF	0.40%	Nov 3, 2026	Equity
13	EES	WisdomTree U.S. SmallCap Fund	0.35%	Jun 30, 2026	Equity
14	FESC	First Eagle Small Cap Equity ETF	0.33%	Jul 31, 2026	Equity
15	ROSC	Hartford Multifactor Small Cap ETF	0.32%	Jul 31, 2026	Equity
16	VIOG	Vanguard S&P Small-Cap 600 Growth ETF	0.32%	Sep 30, 2026	Equity
17	RESM	Columbia Research Enhanced Small Cap ETF	0.30%	Jun 30, 2026	Equity
18	RFLR	Innovator U.S. Small Cap Managed Floor ETF	0.27%	Jul 31, 2026	Equity
19	VTWG	Vanguard Russell 2000 Growth ETF	0.27%	Sep 30, 2026	Equity
20	USVM	VictoryShares US Small Mid Cap Value Momentum ETF	0.25%	Jun 30, 2026	Equity
21	TPSC	Timothy Plan US Small Cap Core ETF	0.25%	Jun 30, 2026	Equity
22	STXK	Strive Small-Cap ETF	0.24%	Jun 30, 2026	Equity
23	VIOO	Vanguard S&P Small-Cap 600 ETF	0.23%	Sep 30, 2026	Equity
24	IJT	iShares S&P Small-Cap 600 Growth ETF	0.23%	Nov 3, 2026	Equity
25	OASC	OneAscent Enhanced Small and Mid Cap ETF	0.23%	Aug 31, 2026	Equity
26	SLYG	State Street SPDR S & P 600 Small Cap Growth ETF	0.23%	Nov 3, 2026	Equity
27	IWO	iShares Russell 2000 Growth ETF	0.21%	Nov 3, 2026	Equity
28	XJR	iShares ESG Select Screened S&P Small-Cap ETF	0.19%	Nov 3, 2026	Equity
29	AVSC	Avantis U.S. Small Cap Equity ETF	0.19%	Nov 2, 2026	Equity
30	FYC	First Trust Small Cap Growth AlphaDEX Fund	0.19%	Nov 3, 2026	Equity
31	QVMS	Invesco S&P SmallCap 600 QVM Multi-factor ETF	0.19%	Nov 3, 2026	Equity
32	SPSM	State Street SPDR Portfolio S&P 600 Small Cap ETF	0.17%	Nov 3, 2026	Equity
33	IJR	iShares Core S&P Small-Cap ETF	0.17%	Nov 3, 2026	Equity
34	BKSE	BNY Mellon US Small Cap Core Equity ETF	0.17%	Jul 31, 2026	Equity
35	BULD	Pacer BlueStar Engineering the Future ETF	0.17%	Jul 31, 2026	Equity
36	SEIS	SEI Select Small Cap ETF	0.17%	Jun 30, 2026	Equity
37	VIOV	Vanguard S&P Small-Cap 600 Value ETF	0.16%	Sep 30, 2026	Equity
38	PRFZ	Invesco RAFI US 1500 Small-Mid ETF	0.15%	Nov 3, 2026	Equity
39	SQLT	iShares MSCI USA Small-Cap Quality Factor ETF	0.15%	Nov 3, 2026	Equity
40	FESM	Fidelity Enhanced Small Cap Core ETF	0.15%	Jun 30, 2026	Equity
41	KBFR	Innovator U.S. Small Cap Managed 10 Buffer ETF	0.14%	Jul 31, 2026	Equity
42	FSMD	Fidelity Small-Mid Multifactor ETF	0.14%	Jul 31, 2026	Equity
43	VTWO	Vanguard Russell 2000 ETF	0.14%	Sep 30, 2026	Equity
44	ACSG	American Century Small Cap Growth Insights ETF	0.13%	Aug 31, 2026	Equity
45	RSSL	Global X Russell 2000 ETF	0.13%	Jul 31, 2026	Equity
46	SMDX	Intech S&P Small-Mid Cap Diversified Alpha ETF	0.13%	Jul 31, 2026	Equity
47	BBSC	JPMorgan BetaBuilders U.S. Small Cap Equity ETF	0.12%	Nov 3, 2026	Equity
48	IJS	iShares S&P Small-Cap 600 Value ETF	0.12%	Nov 3, 2026	Equity
49	SLYV	State Street SPDR S & P 600 Small Cap Value ETF	0.12%	Nov 3, 2026	Equity
50	JSTC	Adasina Social Justice All Cap Global ETF	0.11%	Aug 31, 2026	Equity
51	FSML	FRANKLIN SMALL CAP ENHANCED ETF	0.11%	Jun 30, 2026	Equity
52	EBIT	Harbor Small Cap Earners ETF	0.11%	Jul 31, 2026	Equity
53	IWM	iShares Russell 2000 ETF	0.10%	Nov 3, 2026	Equity
54	FNDA	Schwab Fundamental U.S. Small Company ETF	0.10%	Aug 31, 2026	Equity
55	RUSC	Russell Investments U.S. Small Cap Equity ETF	0.10%	Jun 30, 2026	Equity
56	DFAS	U.S. Small Cap Portfolio: ETF Class Shares	0.09%	Jul 31, 2026	Equity
57	FSCC	Federated Hermes MDT Small Cap Core ETF	0.09%	Aug 31, 2026	Equity
58	OMFS	Invesco Russell 2000 Dynamic Multifactor ETF	0.09%	Nov 3, 2026	Equity
59	VBR	Vanguard Morningstar Small-Cap Value ETF	0.09%	Sep 30, 2026	Equity
60	GSSC	GS ActiveBeta U.S. Small Cap Equity ETF	0.09%	Aug 31, 2026	Equity
61	FSEG	Fidelity Enhanced Small Cap Growth ETF	0.09%	Jun 30, 2026	Equity
62	SMLF	iShares U.S. Small-Cap Equity Factor ETF	0.09%	Nov 3, 2026	Equity
63	JPSE	JPMorgan Diversified Return U.S. Small Cap Equity ETF	0.08%	Nov 3, 2026	Equity
64	SCHA	Schwab U.S. Small-Cap ETF	0.07%	Aug 31, 2026	Equity
65	FTEC	Fidelity MSCI Information Technology Index ETF	0.06%	Jul 31, 2026	Equity
66	ISCB	(name not filed)	0.06%	Jul 31, 2026	Equity
67	VGT	Vanguard Information Tech ETF	0.06%	Sep 30, 2026	Equity
68	VB	Vanguard Morningstar Small-Cap ETF	0.05%	Sep 30, 2026	Equity
69	FYX	First Trust Small Cap Core AlphaDEX Fund	0.05%	Nov 3, 2026	Equity
70	ISCG	iShares Morningstar Small-Cap Growth ETF	0.05%	Nov 3, 2026	Equity
71	VXF	Vanguard Extended Market ETF	0.05%	Sep 30, 2026	Equity
72	MSML	iShares MSCI USA Small-Cap ETF	0.05%	Nov 3, 2026	Equity
73	RWJ	Invesco S&P SmallCap 600 Revenue ETF	0.05%	Nov 3, 2026	Equity
74	ISCV	iShares Morningstar Small-Cap Value ETF	0.04%	Nov 3, 2026	Equity
75	ESML	iShares ESG Aware MSCI USA Small-Cap ETF	0.04%	Nov 3, 2026	Equity
76	FAD	First Trust Multi Cap Growth AlphaDEX Fund	0.04%	Nov 3, 2026	Equity
77	WSML	iShares MSCI World Small-Cap ETF	0.03%	Nov 3, 2026	Equity
78	AVSU	Avantis Responsible U.S. Equity ETF	0.02%	Nov 2, 2026	Equity
79	IGM	iShares Expanded Tech Sector ETF	0.02%	Nov 3, 2026	Equity
80	DFSU	Dimensional US Sustainability Core 1 ETF	0.02%	Jul 31, 2026	Equity
81	MSSM	Morgan Stanley Pathway Small-Mid Cap Equity ETF	0.02%	Aug 31, 2026	Equity
82	DFAC	U.S. Core Equity 2 Portfolio ETF Class Shares	0.01%	Jul 31, 2026	Equity
83	DCOR	US Core Equity 1 Portfolio ETF Class Shares	0.01%	Jul 31, 2026	Equity
84	TILT	Northern Trust Morningstar US Market Factor Tilt ETF	0.01%	Jul 31, 2026	Equity
85	AVTM	Avantis Total Equity Markets ETF	0.01%	Nov 2, 2026	Equity
86	AVUS	Avantis U.S. Equity ETF	0.01%	Nov 3, 2026	Equity
87	DFUV	Dimensional US Marketwide Value ETF	0.01%	Jul 31, 2026	Equity
88	GTPE	Goldman Sachs MSCI World Private Equity Return Tracker ETF	0.01%	Aug 31, 2026	Equity
89	MMTM	State Street SPDR S&P 1500 Momentum Tilt ETF	0.01%	Nov 3, 2026	Equity
90	DFAU	Dimensional US Core Equity Market ETF	0.01%	Jul 31, 2026	Equity
91	ESGV	Vanguard ESG U.S. Stock ETF	0.01%	Sep 30, 2026	Equity
92	DFUS	Dimensional U.S. Equity Market ETF	0.01%	Jul 31, 2026	Equity
93	EBI	Longview Advantage ETF	0.01%	Aug 31, 2026	Equity
94	FNDB	Schwab Fundamental U.S. Broad Market ETF	0.01%	Aug 31, 2026	Equity
95	VLU	State Street SPDR S&P 1500 Value Tilt ETF	0.01%	Nov 3, 2026	Equity
96	ONEQ	Fidelity Nasdaq Composite Index ETF	0.01%	Aug 31, 2026	Equity
97	SCHB	Schwab U.S. Broad Market ETF	0.01%	Aug 31, 2026	Equity
98	SPTM	State Street SPDR Portfolio S&P 1500 Composite Stock Market ETF	0.01%	Nov 3, 2026	Equity
99	VTHR	Vanguard Russell 3000 ETF	0.01%	Sep 30, 2026	Equity
100	VTI	Vanguard Morningstar Total Stock Market ETF	0.01%	Sep 30, 2026	Equity
101	DFAT	U.S. Targeted Value Portfolio ETF Class Shares	<0.01%	Jul 31, 2026	Equity
102	SPGM	State Street SPDR Portfolio MSCI Global Stock Market ETF	<0.01%	Nov 3, 2026	Equity
103	VT	Vanguard Total World Stock Index ETF	<0.01%	Sep 30, 2026	Equity
104	DXUV	US Vector Equity Portfolio ETF Class Shares	<0.01%	Jul 31, 2026	Equity

As of Nov 5, 2026. Source: each fund's own holdings.

Single-stock and leveraged funds on Axcelis Technologies Inc

Exposure as a share of each fund’s net assets, from its own book, books dated Nov 4, 2026.

Single-stock and leveraged funds on Axcelis Technologies Inc

#	Fund	Name	Exposure	Book dated	How
1	ACLZ	Corgi ACLS 2x Daily ETF	198.40%	Nov 4, 2026	Swaps, 2x

As of Nov 5, 2026. Source: each fund's own holdings.

Income and other funds that hold it

#	Fund	Name	Share of the fund	Holdings filed	Category
1	ITWO	ProShares Russell 2000 High Income ETF	0.10%	Aug 31, 2026	Income

As of Nov 5, 2026. Source: each fund's own holdings.

How we count

Axcelis Technologies Inc (ticker ACLS, listed in US) is matched in every holdings book ETFIQ publishes, by its ticker and name.

Amber dates are more than a quarter old; the fund may have traded since.

How books are read →

Where to next

Look up another company→

Themes that hold it: Broad innovation and megatrends, Nanotechnology→

See what a portfolio holds, company by company→

Questions people ask

Which ETFs hold Axcelis Technologies Inc?: 104 thematic and core ETFs hold Axcelis Technologies Inc, by holdings dated Jun 30, 2026 to Nov 3, 2026. The largest positions are TINY at 3.59% of the fund on Nov 3, 2026, PSCT at 1.36% of the fund on Nov 3, 2026 and SPIT at 1.20% of the fund on Aug 31, 2026. 1 single-stock and leveraged fund and 1 income and other fund on it are listed apart.

Sources and dates

HoldingsSEC Form N-PORT, what a fund filed it holds ↗

FilingsSEC EDGAR, full-text search of fund filings ↗

Links go to the source documents. ETFIQ is an independent publisher and makes no recommendations. Standards and sources →

Cite this pageCitation, APA and Markdown

ETFIQ, ETFs holding Axcelis Technologies Inc, data as of Nov 5, 2026. https://etfiq.com/holdings/acls/

Open data →

Free to use with attribution for data ETFIQ computes; issuer data stays under its owner's terms. The underlying files are at Open data.

.dc-more{display:revert!important}.dc-more[style^="display:flex"]{display:flex!important}.dc-more[style^="display:grid"]{display:grid!important}[data-show-all],[data-show-all-idx]{display:none!important}