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Nanotechnology ETF: what it holds

Funds that hold companies working at very small scale: advanced materials, nanoscale manufacturing and the instruments used on them. 1 fund, largest first, measured by holdings rather than by name. It carries 19% of its weight in S&P 500 names, which is the 40th most of the 53 themes here with filed books.

The short answers

How many there are
1 US listed nanotechnology ETF, as of Sep 18, 2026.
Net assets
TINY, ProShares Nanotechnology ETF, $13m.
Fee
TINY, ProShares Nanotechnology ETF, 0.58% a year.
Total return, one year
+48.6% to Sep 18, 2026.

What this fund actually owns

TINY is the only nanotechnology fund here with a filed book. Its ten largest holdings are below.

Nanotechnology ETFs, the companies their ten largest holdings name. Source: each fund's latest SEC filing or its issuer’s own daily holdings file, read by ETFIQ.
CompanyWeight in TINY
BRUKER CORP BRKR7.7%
SCREEN HOLDINGS CO LTD5.7%
ASML HOLDING NV ASML5.2%
TAIWAN SEMICONDUCTOR MANUFAC5.1%
LAM RESEARCH CORP LRCX5.0%
NVIDIA CORP NVDA4.9%
APPLIED MATERIALS INC AMAT4.9%
NIKON CORP4.9%
JGC HOLDINGS CORP4.7%
CABOT CORP CBT4.6%

Each fund files its whole book and this counts the ten largest out of it, so a fund missing from a row may still hold that company below its own tenth position. Weights are of the funds that name it, never of the theme.

Nanotechnology ETF: what it holds, as of Sep 18, 2026. Source: ETFIQ.
TickerFundIssuerNet assetsIn the S&P 500Active shareTotal return 1Yvs S&P 500Fee
TINYProShares Nanotechnology ETFProShares$13m18.6%93.3%+48.6%+32.0 pts0.58%

Questions people ask

How many nanotechnology ETFs are there?
One, TINY, ProShares Nanotechnology ETF, as of Sep 18, 2026. That is every one it can measure from the fund’s own published holdings.
What is the largest nanotechnology ETF?
TINY, ProShares Nanotechnology ETF is the only one, at $13m in net assets as of Sep 18, 2026.
What is the cheapest nanotechnology ETF?
TINY, ProShares Nanotechnology ETF is the only one, and it charges 0.58% a year.
What do nanotechnology ETFs hold?
Funds that hold companies working at very small scale: advanced materials, nanoscale manufacturing and the instruments used on them. Between them the 1 nanotechnology ETFs ETFIQ can read name 10 companies in their ten largest holdings, most widely BRUKER CORP, which is among the ten largest of 1 of them.

What the issuers say about this theme

The houses behind these nanotechnology funds publish their own work on the subject. These are their pages and their words, not ETFIQ’s, and a fund company writing about a theme it sells a fund on is making a case. Read them that way.

Issuer material on this theme. Links leave ETFIQ. Source: each issuer’s own site.
IssuerWhat they publishKind
ProSharesProShares insightsTheir research index

Where to next

Where these figures came from

ETFIQ links to the documents behind every figure. It is not affiliated with any issuer, and a link is not an endorsement.

ETFIQ is an independent publisher and makes no recommendations; every figure is calculated from published data. Standards and sources

Cite this page. ETFIQ, Nanotechnology ETF: what it holds, data as of Sep 18, 2026. https://etfiq.com/themes/nanotech Free to use with attribution; the underlying files are at Open data.