Data as of Nov 4, 2026.

Theme · 1 fund

Nanotechnology ETF: what it holds

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See the nanotechnology ETF by what it holds, not by its name. Funds that hold companies working at very small scale: advanced materials, nanoscale manufacturing and the instruments used on them. 1 fund, largest first. Updated Nov 4, 2026. It carries 19% of its weight in S&P 500 stocks, the 39th most of the 54 themes with holdings on file.

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The short answers
How many there are
1
US listed nanotechnology ETF, as of Nov 4, 2026.
Net assets
$11m
Fee, a year
0.58%
Total return, one year
+22.8%

What this fund actually owns

TINY is the only nanotechnology fund here with a filed book. Its ten largest holdings are below.
CompanyIn the top ten ofAvg weightLargest, and where
BRUKER CORP BRKR1 of 18.2%8.2% in TINY
ASML HOLDING NV ASML1 of 15.6%5.6% in TINY
NIKON CORP 1 of 15.4%5.4% in TINY
TAIWAN SEMICONDUCTOR MANUFAC 1 of 15.3%5.3% in TINY
NVIDIA CORP NVDA1 of 15.2%5.2% in TINY
ENTEGRIS INC ENTG1 of 15.2%5.2% in TINY
CABOT CORP CBT1 of 15.0%5.0% in TINY
APPLIED MATERIALS INC AMAT1 of 14.8%4.8% in TINY
JGC HOLDINGS CORP 1 of 14.8%4.8% in TINY
SCREEN HOLDINGS CO LTD 1 of 14.6%4.6% in TINY

Nanotechnology ETFs, the companies their ten largest holdings name. Source: each fund's latest SEC filing or its issuer’s own daily holdings file, read by ETFIQ.

How this is counted

Each row counts the ten largest holdings of each fund, so a fund missing from a row may still hold that company lower down. Weights are of the funds that name it, not of the theme.

Share already in the S&P 500
TINY
19.0%

Share of each fund's weight in S&P 500 companies. Above half, the fund is mostly the S&P 500.

One year total return, the 1 with a full year
TINY
+22.8%not measured

Dark line: the S&P 500 over the same days, +14.8%. Last column: the gap to each fund's own benchmark, in points.

The nanotechnology ETF

ETFIQ covers one nanotechnology ETF, TINY ($11m); its fee is 0.58%, as of .

  1. 1TINY$11m0.58%ProShares Nanotechnology ETF

Every nanotechnology ETF, largest first

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Net assets
Nanotechnology ETF: what it holds
TickerFundIssuerNet assets ↓In the S&P 500Active shareTotal return 1Yvs its benchmark 1YFee
TINYProShares Nanotechnology ETFProShares$11m19.0%93.0%+22.8%not measured0.58%
Nanotechnology ETF: what it holds, as of Nov 4, 2026. Source: ETFIQ.TINY

Questions people ask

How many nanotechnology ETFs are there?
One, TINY, ProShares Nanotechnology ETF, as of Nov 4, 2026. That is every one it can measure from the fund’s own published holdings.
What is the largest nanotechnology ETF?
TINY, ProShares Nanotechnology ETF is the only one, at $11m in net assets as of Nov 4, 2026.
What is the cheapest nanotechnology ETF?
TINY, ProShares Nanotechnology ETF is the only one, and it charges 0.58% a year by its prospectus filed Sep 25, 2026.
What do nanotechnology ETFs hold?
Funds that hold companies working at very small scale: advanced materials, nanoscale manufacturing and the instruments used on them. Between them the 1 nanotechnology ETFs ETFIQ can read name 10 companies in their ten largest holdings, by holdings dated Nov 3, 2026, most widely BRUKER CORP, which is among the ten largest of 1 of them.

What the issuers say about this theme

About these links

The issuers behind these nanotechnology funds publish their own work on this theme. These are their pages and words, not ETFIQ’s. A fund company writing about a theme it sells is making a case.

Issuer material on this theme. Links leave ETFIQ. Source: each issuer’s own site.

Where to next
Sources and dates
Fund holdings from SEC Form N-PORT and from the issuers’ own daily filessec.gov ↗
SEC EDGAR, full-text search of fund filingsefts.sec.gov ↗
SEC Form N-PORT, what a fund filed it holdssec.gov ↗
Rule 19a-1, what a distribution notice must sayecfr.gov ↗

Links are sources, not endorsements. Standards and sources →

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ETFIQ, Nanotechnology ETF: what it holds, data as of Nov 4, 2026. https://etfiq.com/themes/nanotech

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Free to use with attribution for data ETFIQ computes; issuer data stays under its owner's terms. The underlying files are at Open data.