Data as of Oct 27, 2026.
Semiconductor ETFs: what each one holds
See every semiconductor ETF by what it holds, not by its name. Funds that hold chip designers, chip makers and the companies that supply the equipment and materials they use. 11 funds, largest first. Updated Oct 27, 2026. The typical fund carries 66% of its weight in S&P 500 stocks, the 3rd most of the 53 themes with holdings on file.
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What these funds actually own
Between them the 11 funds' ten largest holdings name 45 companies, of which 16 appear in more than one.More
Advanced Micro Devices Inc is among the ten largest of 8 of them, at an average of 6.1% of the fund.
Semiconductors ETFs, the companies their ten largest holdings name. The 15 most widely held of 45. Source: each fund's latest SEC filing or its issuer’s own daily holdings file, read by ETFIQ.
How this is counted
Each row counts the ten largest holdings of each fund, so a fund missing from a row may still hold that company lower down. Weights are of the funds that name it, not of the theme.
Share of each fund's weight in S&P 500 companies. Above half, the fund is mostly the S&P 500.
Dark line: the S&P 500 over the same days, +13.5%. Last column: the gap to each fund's own benchmark, in points.
The 10 largest semiconductor ETFs
ETFIQ covers 11 semiconductor ETFs. The largest are SMH ($66.6bn), SOXX ($46.4bn) and SOXQ ($2.9bn); fees run 0.15% to 0.65%, as of .
- 1SMH$66.6bn0.35%VanEck Semiconductor ETF
- 2SOXX$46.4bn0.33%iShares Semiconductor ETF
- 3SOXQ$2.9bn0.19%Invesco PHLX Semiconductor ETF
- 4XSD$2.5bn0.35%State Street SPDR S&P Semiconductor ETF
- 5PSI$2.4bn0.55%Invesco Semiconductors ETF
- 6FTXL$1.1bn0.60%First Trust Nasdaq Semiconductor ETF
- 7SHOC$278m0.40%Strive U.S. Semiconductor ETF
- 8EUV$276m0.35%Corgi Lithography & Semiconductor Photonics ETF
- 9SMHX$237m0.35%VanEck Fabless Semiconductor ETF
- 10CHPS$130m0.15%Xtrackers Semiconductor Select Equity ETF
Every semiconductor ETF, largest first
Click a column to sortPoints (pts) are percentage points.
| Ticker | Fund | Issuer | Net assets ↓ | In the S&P 500 | Active share | Total return 1Y | vs its benchmark 1Y | Fee |
|---|---|---|---|---|---|---|---|---|
| SMH | VanEck Semiconductor ETF | VanEck | $66.6bn | 79.3% | 80.7% | +55.5% | +42.4 pts vs ACWI | 0.35% |
| SOXX | iShares Semiconductor ETF | iShares | $46.4bn | 74.5% | 82.3% | +68.6% | +55.5 pts vs PBUS | 0.33% |
| SOXQ | Invesco PHLX Semiconductor ETF | Invesco | $2.9bn | 81.5% | 80.8% | +60.9% | not measured | 0.19% |
| XSD | State Street SPDR S&P Semiconductor ETF | State Street | $2.5bn | 40.5% | 88.6% | +37.4% | +23.8 pts vs IVV | 0.35% |
| PSI | Invesco Semiconductors ETF | Invesco | $2.4bn | 51.7% | 92.2% | +65.1% | not measured | 0.55% |
| FTXL | First Trust Nasdaq Semiconductor ETF | First Trust | $1.1bn | 83.8% | 80.9% | +81.9% | not measured | 0.60% |
| SHOC | Strive U.S. Semiconductor ETF | Strive | $278m | 88.9% | 80.5% | +48.0% | not measured | 0.40% |
| EUV | Corgi Lithography & Semiconductor Photonics ETF | Corgi | $276m | 36.6% | 96.6% | first traded 174 days ago | · | 0.35% |
| SMHX | VanEck Fabless Semiconductor ETF | VanEck | $237m | 65.9% | 87.2% | +34.0% | +20.9 pts vs ACWI | 0.35% |
| CHPS | Xtrackers Semiconductor Select Equity ETF | Xtrackers | $130m | 60.9% | 84.8% | +75.8% | +62.7 pts vs ACWI | 0.15% |
| SMHC | VanEck China Semiconductor ETF | VanEck | $13m | 0.0% | 100.0% | first traded 125 days ago | · | 0.65% |
How much of each pair is the same fund
The closest pair is SOXQ and SOXX, which hold 83% of their weight in the same companies. The furthest apart is EUV and SMHX at 4%. The middle pair of the 45 is 40%. The grid is the 10 largest of 11 funds.
Semiconductor ETFs, the share of each pair’s weight held in the same companies. Read across or down; the number is the same either way. Cells are shaded against the closest pair here, 83%. Source: each fund’s own filed or daily holdings, read by ETFIQ.
How to read the grid
Weight overlap adds the smaller of the two weights for every company both funds hold. Funds with a cut-short book are left out, not compared short.
What each fund holds alone
Semiconductor ETFs, the largest holding no other fund in the grid holds. Source: ETFIQ.
Questions people ask
- How many semiconductor ETFs are there?
- ETFIQ covers 11 US listed semiconductor ETFs as of Oct 27, 2026. That is every one it can measure from the fund’s own published holdings.
- What is the largest semiconductor ETF?
- SMH, VanEck Semiconductor ETF, at $66.6bn in net assets as of Oct 23, 2026, the largest of the 11 semiconductor ETFs with a published size.
- What is the cheapest semiconductor ETF?
- CHPS, Xtrackers Semiconductor Select Equity ETF, at 0.15% a year by its prospectus filed Sep 25, 2026, the lowest fee of the 11 semiconductor ETFs that publish one.
- Which semiconductor ETF has performed best over the past year?
- FTXL, First Trust Nasdaq Semiconductor ETF, at +81.9% total return over the year to Oct 27, 2026, the highest of the 9 semiconductor ETFs with a full year of trading behind them. Past returns do not predict future ones.
- What do semiconductor ETFs hold?
- Funds that hold chip designers, chip makers and the companies that supply the equipment and materials they use. Between them the 11 semiconductor ETFs ETFIQ can read name 45 companies in their ten largest holdings, by holdings dated May 29, 2026 to Oct 27, 2026, most widely Advanced Micro Devices Inc, which is among the ten largest of 8 of them.
- Do semiconductor ETFs hold the same companies?
- It depends which two. Across the 45 pairs of the 10 semiconductor ETFs with a full published book, by holdings dated May 29, 2026 to Oct 27, 2026, SOXQ and SOXX hold 83% of their weight in the same companies, EUV and SMHX hold 4%, and the middle pair holds 40%. Two funds sold on one theme are not the same fund.
What the issuers say about this theme
About these links
The issuers behind these semiconductor funds publish their own work on this theme. These are their pages and words, not ETFIQ’s. A fund company writing about a theme it sells is making a case.
Issuer material on this theme. Links leave ETFIQ. Source: each issuer’s own site.
Links are sources, not endorsements. Standards and sources →
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<figure style="margin:0;max-width:640px">
<a href="https://etfiq.com/themes/semis"><img src="https://etfiq.com/assistant/api/embed/theme/semis.svg" alt="Semiconductors ETFs, one-year total return to Oct 27, 2026: FTXL +81.9%, CHPS +75.8%, SOXX +68.6%, PSI +65.1%, SOXQ +60.9%, SMH +55.5%, SHOC +48.0%, SMHX +34.0%." width="640" style="max-width:100%;height:auto"></a>
<figcaption style="font:13px/1.5 sans-serif">Semiconductors ETFs, one-year total return to Oct 27, 2026: FTXL +81.9%, CHPS +75.8%, SOXX +68.6%, PSI +65.1%, SOXQ +60.9%, SMH +55.5%, SHOC +48.0%, SMHX +34.0%. Data: <a href="https://etfiq.com/themes/semis">ETFIQ</a></figcaption>
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ETFIQ, Semiconductor ETFs: what each one holds, data as of Oct 27, 2026. https://etfiq.com/themes/semis
ETFIQ. (Oct 27, 2026). Semiconductor ETFs: what each one holds. Retrieved from https://etfiq.com/themes/semis
[Semiconductor ETFs: what each one holds (ETFIQ, Oct 27, 2026)](https://etfiq.com/themes/semis)
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