As of Oct 27, 2026. Rebuilt every trading night.
The largest semiconductor ETFs
See 11 funds ranked by net assets. Updated Oct 27, 2026. Every fund here is sold on semiconductor. The column beside the size shows how much of each the S&P 500 already holds.
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All 11, highest first
11 of 11 · click a column to sort| # | Ticker | Fund | Net assets ↓ | Weight in S&P 500 companies | Total return, 1Y | Fee | Source |
|---|---|---|---|---|---|---|---|
| 1 | SMH | VanEck Semiconductor ETF | $66.6bn | 79.3% | +55.5% | 0.35% | ETFIQ, shares × NAV, Oct 23, 2026 |
| 2 | SOXX | iShares Semiconductor ETF | $46.4bn | 74.5% | +68.6% | 0.33% | Issuer daily, Oct 26, 2026 |
| 3 | SOXQ | Invesco PHLX Semiconductor ETF | $2.9bn | 81.5% | +60.9% | 0.19% | Issuer page, Oct 26, 2026 |
| 4 | XSD | State Street SPDR S&P Semiconductor ETF | $2.5bn | 40.5% | +37.4% | 0.35% | Issuer daily, Oct 26, 2026 |
| 5 | PSI | Invesco Semiconductors ETF | $2.4bn | 51.7% | +65.1% | 0.55% | Issuer page, Oct 26, 2026 |
| 6 | FTXL | First Trust Nasdaq Semiconductor ETF | $1.1bn | 83.8% | +81.9% | 0.60% | Issuer page, Oct 26, 2026 |
| 7 | SHOC | Strive U.S. Semiconductor ETF | $278m | 88.9% | +48.0% | 0.40% | SEC filing, Jun 30, 2026 |
| 8 | EUV | Corgi Lithography & Semiconductor Photon | $276m | 36.6% | too new | 0.35% | Issuer daily, Oct 27, 2026 |
| 9 | SMHX | VanEck Fabless Semiconductor ETF | $237m | 65.9% | +34.0% | 0.35% | ETFIQ, shares × NAV, Oct 23, 2026 |
| 10 | CHPS | Xtrackers Semiconductor Select Equity ET | $130m | 60.9% | +75.8% | 0.15% | Issuer page, Oct 26, 2026 |
| 11 | SMHC | VanEck China Semiconductor ETF | $13m | 0.0% | too new | 0.65% | ETFIQ, shares × NAV, Oct 23, 2026 |
The 11 ETFs in the semiconductors theme, of which 11 publish net assets, ranked on the most recent number for each.
The rest of the method
Across the funds listed here the weight held in S&P 500 companies runs from 0.0% to 88.9%. Size shows where the money is, not what a fund did. The list sorts one published number, with no scoring or weighting. Every fund ETFIQ covers in this category is eligible, closed funds included.
Links are sources, not endorsements. A ranking is not a recommendation or an opinion.
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ETFIQ, The largest semiconductor ETFs, ranked by net assets, data as of Oct 27, 2026. https://etfiq.com/rankings/themes-largest-semis
ETFIQ. (Oct 27, 2026). The largest semiconductor ETFs, ranked by net assets. Retrieved from https://etfiq.com/rankings/themes-largest-semis
[The largest semiconductor ETFs, ranked by net assets (ETFIQ, Oct 27, 2026)](https://etfiq.com/rankings/themes-largest-semis)
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