Ranked by net assets, as of . Rebuilt every trading night.
The largest semiconductor ETFs
Every fund here is sold on semiconductor. What each one holds, and how much of it the S&P 500 already holds for you, is the column beside the size.
| # | Ticker | Fund | Net assets | Weight in S&P 500 companies | Total return, 1Y | Fee | Source |
|---|---|---|---|---|---|---|---|
| 1 | SMH | VanEck Semiconductor ETF | $77.2bn | 82.3% | +87.6% | 0.35% | SEC filing, whole fund |
| 2 | SOXX | iShares Semiconductor ETF | $47.8bn | 73.8% | +107.5% | 0.33% | SEC filing, whole fund |
| 3 | XSD | State Street(R) SPDR(R) S&P(R) Semicondu | $3.5bn | 38.0% | +69.1% | 0.35% | SEC filing, whole fund |
| 4 | FTXL | First Trust Nasdaq Semiconductor ETF | $2.8bn | 85.6% | +124.3% | 0.60% | SEC filing, whole fund |
| 5 | SOXQ | Invesco PHLX Semiconductor ETF | $2.4bn | 81.8% | +98.0% | 0.19% | SEC filing, whole fund |
| 6 | PSI | Invesco Semiconductors ETF | $2.0bn | 48.3% | +108.3% | 0.55% | SEC filing, whole fund |
| 7 | SMHX | VanEck Fabless Semiconductor ETF | $297m | 60.7% | +52.5% | 0.35% | SEC filing, whole fund |
| 8 | SHOC | Strive U.S. Semiconductor ETF | $278m | 90.7% | +76.6% | 0.40% | SEC filing, whole fund |
| 9 | CHPS | Xtrackers Semiconductor Select Equity ET | $90m | 61.0% | +131.1% | 0.15% | SEC filing, whole fund |
| 10 | SMHC | VanEck China Semiconductor ETF | $7m | 0.0% | too new | 0.65% | SEC filing, whole fund |
Method
The 11 ETFs in the semiconductors theme, of which 10 publish net assets, ranked on the most recent figure for each. Across the funds listed here the weight held in S&P 500 companies runs from 0.0% to 90.7%. Size is not a measure of anything a fund did. It is where the money is. The ranking is the published field sorted, nothing else: no scoring, no weighting and no view on any fund. Every fund ETFIQ covers in this category is eligible, including funds that have closed, because leaving them out would flatter the category.
Where to next
Where these figures came from
ETFIQ links to the documents behind every figure. It is not affiliated with any issuer, and a link is not an endorsement.
A ranking is not a recommendation and no order on this site is an opinion. ETFIQ is an independent publisher, not an adviser. Standards and sources
Cite this page. ETFIQ, The largest semiconductor ETFs, ranked by net assets, data as of Sep 11, 2026. https://etfiq.com/rankings/themes-largest-semis Free to use with attribution; the underlying files are at Open data.