As of Nov 4, 2026. Rebuilt every trading night.
The cheapest semiconductor ETFs
See 11 funds ranked by the annual fee the fund charges. Updated Nov 4, 2026. A fee is one fact, not a verdict. Funds on one theme can hold different companies, and the holdings are on the theme page.
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All 11, lowest first
11 of 11 · click a column to sort| # | Ticker | Fund | Fee ↑ | Net assets | Weight in S&P 500 companies | Total return, 1Y |
|---|---|---|---|---|---|---|
| 1 | CHPS | Xtrackers Semiconductor Select Equity ET | 0.15% | $127m | 58.8% | +59.9% |
| 2 | SOXQ | Invesco PHLX Semiconductor ETF | 0.19% | $2.8bn | 81.4% | +47.7% |
| 3 | SOXX | iShares Semiconductor ETF | 0.33% | $44.3bn | 73.2% | +52.5% |
| 4 | EUV | Corgi Lithography & Semiconductor Photon | 0.35% | $245m | 35.5% | too new |
| 5 | SMH | VanEck Semiconductor ETF | 0.35% | $67.3bn | 78.8% | +43.4% |
| 6 | SMHX | VanEck Fabless Semiconductor ETF | 0.35% | $241m | 66.4% | +27.1% |
| 7 | XSD | State Street SPDR S&P Semiconductor ETF | 0.35% | $2.4bn | 40.2% | +34.9% |
| 8 | SHOC | Strive U.S. Semiconductor ETF | 0.40% | $278m | 88.9% | +35.7% |
| 9 | PSI | Invesco Semiconductors ETF | 0.55% | $2.2bn | 50.9% | +50.0% |
| 10 | FTXL | First Trust Nasdaq Semiconductor ETF | 0.60% | $1.1bn | 82.9% | +66.7% |
| 11 | SMHC | VanEck China Semiconductor ETF | 0.65% | $11m | 0.0% | too new |
The 11 of 11 ETFs in the semiconductors theme that publish an expense ratio, cheapest first. Across the funds listed here the annual fee runs from 0.1% to 0.7%.
The rest of the method
A fee is the one number a fund controls and the one a holder always pays. The list sorts one published number, with no scoring or weighting. Every fund ETFIQ covers in this category is eligible, closed funds included.
Links are sources, not endorsements. A ranking is not a recommendation or an opinion.
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ETFIQ, The cheapest semiconductor ETFs, ranked by the annual fee the fund charges, data as of Nov 4, 2026. https://etfiq.com/rankings/themes-cheapest-semis
ETFIQ. (Nov 4, 2026). The cheapest semiconductor ETFs, ranked by the annual fee the fund charges. Retrieved from https://etfiq.com/rankings/themes-cheapest-semis
[The cheapest semiconductor ETFs, ranked by the annual fee the fund charges (ETFIQ, Nov 4, 2026)](https://etfiq.com/rankings/themes-cheapest-semis)
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