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The cheapest semiconductor ETFs
A fee is one fact and not a verdict on the fund. Where the funds on a theme hold different companies, the cheapest is not even the same bet, and the holdings are on the theme page.
| # | Ticker | Fund | Fee | Net assets | Weight in S&P 500 companies | Total return, 1Y |
|---|---|---|---|---|---|---|
| 1 | CHPS | Xtrackers Semiconductor Select Equity ET | 0.15% | $118m | 61.0% | +115.8% |
| 2 | SOXQ | Invesco PHLX Semiconductor ETF | 0.19% | $3.1bn | 81.7% | +90.6% |
| 3 | SOXX | iShares Semiconductor ETF | 0.33% | $45.4bn | 74.1% | +99.9% |
| 4 | SMH | VanEck Semiconductor ETF | 0.35% | $72.5bn | 82.2% | +81.3% |
| 5 | SMHX | VanEck Fabless Semiconductor ETF | 0.35% | $267m | 65.8% | +48.5% |
| 6 | XSD | State Street(R) SPDR(R) S&P(R) Semicondu | 0.35% | $3.0bn | 38.2% | +58.2% |
| 7 | SHOC | Strive U.S. Semiconductor ETF | 0.40% | $278m | 90.7% | +72.0% |
| 8 | PSI | Invesco Semiconductors ETF | 0.55% | $2.7bn | 48.5% | +96.1% |
| 9 | FTXL | First Trust Nasdaq Semiconductor ETF | 0.60% | $1.5bn | 78.5% | +116.0% |
| 10 | SMHC | VanEck China Semiconductor ETF | 0.65% | $21m | 0.0% | too new |
Method
The 10 of 11 ETFs in the semiconductors theme that publish an expense ratio, cheapest first. Across the funds listed here the annual fee runs from 0.1% to 0.7%. A fee is the one number a fund controls and the one a holder pays whatever happens. The ranking is the published field sorted, nothing else: no scoring, no weighting and no view on any fund. Every fund ETFIQ covers in this category is eligible, including funds that have closed, because leaving them out would flatter the category.
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A ranking is not a recommendation and no order on this site is an opinion. ETFIQ is an independent publisher, not an adviser. Standards and sources
Cite this page. ETFIQ, The cheapest semiconductor ETFs, ranked by the annual fee the fund charges, data as of Sep 18, 2026. https://etfiq.com/rankings/themes-cheapest-semis Free to use with attribution; the underlying files are at Open data.