Themes · ranked by the annual fee the fund charges

The cheapest AI infrastructure ETFs

A fee is one fact and not a verdict on the fund. Where the funds on a theme hold different companies, the cheapest is not even the same bet, and the holdings are on the theme page.

#TickerFundFee ↑Net assetsWeight in S&P 500 companiesTotal return, 1Y
1CHPXGlobal X AI Semiconductor & Quantum ETF0.50%$125m62.1%+98.8%
2PHOXAura AI Photonics ETF0.60%$0not filedtoo new
3AINFDefiance Inference AI Chip ETF0.65%$518,954not publishedtoo new
4KSMHxETFs Korea AI Semiconductor ETF0.65%$0not filedtoo new
5TCAITortoise AI Infrastructure ETF0.65%$217m63.2%+56.7%
6AIPODefiance AI & Power Infrastructure ETF0.69%$925m63.0%+24.2%
7CGPTVegaShares AI Inference ETF0.75%$0not filedtoo new
8COOLVegaShares AI Thermal, Cooling & Power M0.75%$0not filedtoo new
9IVEPDan IVES Wedbush AI Power & Infrastructu0.75%$19m67.1%too new
10AIHYDefiance AI Hyperscale Leaders ETF0.76%$17mnot publishedtoo new
The cheapest AI infrastructure ETFs, ranked by the annual fee the fund charges, as of Oct 2, 2026. Source: ETFIQ.

Method

The 10 of 11 ETFs in the ai infrastructure and chips theme that publish an expense ratio, cheapest first. Across the funds listed here the annual fee runs from 0.5% to 0.8%. A fee is the one number a fund controls and the one a holder pays whatever happens. The ranking is the published field sorted, nothing else: no scoring, no weighting and no view on any fund. Every fund ETFIQ covers in this category is eligible, including funds that have closed, because leaving them out would flatter the category.

Where these figures came from

ETFIQ links to the documents behind every figure. It is not affiliated with any issuer, and a link is not an endorsement. A ranking is not a recommendation and no order on this site is an opinion. ETFIQ is an independent publisher, not an adviser.

Cite this page

ETFIQ, The cheapest AI infrastructure ETFs, ranked by the annual fee the fund charges, data as of Oct 2, 2026. https://etfiq.com/rankings/themes-cheapest-ai-infra

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