Data as of .
Semiconductors ETFs: what each one actually holds
10 funds, measured by holdings rather than by name. The typical fund carries 81% of its weight in S&P 500 names.
| Ticker | Fund | Issuer | In the S&P 500 | Active share | Total return 1Y | vs S&P 500 | Fee |
|---|---|---|---|---|---|---|---|
| SMH | VanEck Semiconductor ETF | VanEck | 82.0% | 80.6% | +96.2% | +76.3 pts | 0.35% |
| SOXX | iShares Semiconductor ETF | iShares | 80.8% | 81.6% | +113.9% | +93.9 pts | not published |
| XSD | State Street(R) SPDR(R) S&P(R) Semiconductor ETF | State Street | 33.4% | 89.4% | +71.8% | +51.8 pts | 0.35% |
| FTXL | First Trust Nasdaq Semiconductor ETF | First Trust | 85.6% | 81.2% | +131.1% | +111.2 pts | 0.60% |
| SOXQ | Invesco PHLX Semiconductor ETF | Invesco | 84.0% | 80.8% | +107.9% | +87.9 pts | 0.19% |
| PSI | Invesco Semiconductors ETF | Invesco | 52.2% | 86.4% | +116.0% | +96.0 pts | 0.55% |
| SMHX | VanEck Fabless Semiconductor ETF | VanEck | 60.7% | 87.1% | +59.0% | +39.0 pts | 0.35% |
| SHOC | Strive U.S. Semiconductor ETF | not published | 90.7% | 80.4% | +88.8% | +68.8 pts | 0.40% |
| CHPS | Xtrackers Semiconductor Select Equity ETF | Xtrackers | 61.0% | 84.8% | +143.7% | +123.7 pts | 0.15% |
| NODE | Themes Semiconductors ETF | Themes | not published | not published | +24.4% | +4.4 pts | not published |
Where to next
ETFIQ is an independent publisher and makes no recommendations; every figure is stated arithmetic on published data. Standards and sources
Cite this page. ETFIQ, Semiconductors ETFs: what each one actually holds, data as of Sep 4, 2026. https://etfiq.com/themes/semis.html Free to use with attribution; the underlying files are at Open data.