# Semiconductor ETFs: 11 funds, largest first

> ETFIQ covers 11 semiconductor ETFs. The largest are SMH ($66.6bn), SOXX ($46.4bn) and SOXQ ($2.9bn); fees run 0.15% to 0.65%, as of Oct 23 to 26, 2026.

Data as of Oct 27, 2026. Rebuilt every trading night.

Data as of Oct 27, 2026 .

## Semiconductor ETFs: what each one holds

See every semiconductor ETF by what it holds, not by its name. Funds that hold chip designers, chip makers and the companies that supply the equipment and materials they use. 11 funds, largest first. Updated Oct 27, 2026. The typical fund carries 66% of its weight in S&P 500 stocks, the 3rd most of the 53 themes with holdings on file.

11 US listed semiconductor ETFs

$66.6bn The largest, SMH

0.15% The cheapest, CHPS

+81.9% Best one year, FTXL

### The short answers

Least like the S&P 500 SMHC , VanEck China Semiconductor ETF, 0.0% of its weight in S&P 500 companies. Closest pair SOXQ and SOXX , 83% of their weight in the same companies.

### What these funds actually own

Between them the 11 funds' ten largest holdings name 45 companies, of which 16 appear in more than one. Advanced Micro Devices Inc is among the ten largest of 8 of them, at an average of 6.1% of the fund.

| Company | Among the ten largest of | Average weight where it is | Largest, and in which fund |
| --- | --- | --- | --- |
| Advanced Micro Devices Inc AMD | 8 of 11 | 6.1% | 9.3% in SOXX |
| Broadcom Inc AVGO | 7 of 11 | 7.9% | 12.5% in SMHX |
| Micron Technology Inc MU | 7 of 11 | 7.7% | 13.8% in SHOC |
| Texas Instruments Inc TXN | 7 of 11 | 4.7% | 6.4% in PSI |
| Marvell Technology Inc MRVL | 7 of 11 | 4.5% | 5.1% in SMHX |
| Nvidia Corp NVDA | 6 of 11 | 14.5% | 20.9% in SMH |
| INTEL CORPORATION INTC | 6 of 11 | 6.1% | 8.3% in SOXX |
| Qualcomm Inc QCOM | 6 of 11 | 5.2% | 8.4% in FTXL |
| Analog Devices Inc ADI | 6 of 11 | 4.6% | 6.1% in PSI |
| Lam Research Corp LRCX | 4 of 11 | 4.5% | 5.3% in EUV |
| Taiwan Semiconductor Manufacturing Co L TSM | 3 of 11 | 9.0% | 12.9% in EUV |
| Asml Holding Nv ASML | 3 of 11 | 6.7% | 10.6% in EUV |
| Applied Materials Inc AMAT | 3 of 11 | 5.6% | 6.5% in SHOC |
| KLA Corp KLAC | 3 of 11 | 4.7% | 5.1% in SHOC |
| NXP SEMICONDUCTORS NV NXPI | 3 of 11 | 3.6% | 4.4% in FTXL |

The 15 most widely held of 45. Each row counts the ten largest holdings of each fund, so a fund missing from a row may still hold that company lower down. Weights are of the funds that name it, not of the theme.

### The 10 largest semiconductor ETFs

ETFIQ covers 11 semiconductor ETFs. The largest are SMH ( $66.6bn ), SOXX ( $46.4bn ) and SOXQ ( $2.9bn ); fees run 0.15% to 0.65% , as of Oct 23 to 26, 2026 .

- SMH VanEck Semiconductor ETF $66.6bn 0.35%

- SOXX iShares Semiconductor ETF $46.4bn 0.33%

- SOXQ Invesco PHLX Semiconductor ETF $2.9bn 0.19%

- XSD State Street SPDR S&P Semiconductor ETF $2.5bn 0.35%

- PSI Invesco Semiconductors ETF $2.4bn 0.55%

- FTXL First Trust Nasdaq Semiconductor ETF $1.1bn 0.60%

- SHOC Strive U.S. Semiconductor ETF $278m 0.40%

- EUV Corgi Lithography & Semiconductor Photonics ETF $276m 0.35%

- SMHX VanEck Fabless Semiconductor ETF $237m 0.35%

- CHPS Xtrackers Semiconductor Select Equity ETF $130m 0.15%

| Ticker | Fund | Issuer | Net assets | In the S&P 500 | Active share | Total return 1Y | vs its benchmark 1Y | Fee |
| --- | --- | --- | --- | --- | --- | --- | --- | --- |
| SMH | VanEck Semiconductor ETF | VanEck | $66.6bn | 79.3% | 80.7% | +55.5% | +42.4 pts vs ACWI | 0.35% |
| SOXX | iShares Semiconductor ETF | iShares | $46.4bn | 74.5% | 82.3% | +68.6% | +55.5 pts vs PBUS | 0.33% |
| SOXQ | Invesco PHLX Semiconductor ETF | Invesco | $2.9bn | 81.5% | 80.8% | +60.9% | not measured | 0.19% |
| XSD | State Street SPDR S&P Semiconductor ETF | State Street | $2.5bn | 40.5% | 88.6% | +37.4% | +23.8 pts vs IVV | 0.35% |
| PSI | Invesco Semiconductors ETF | Invesco | $2.4bn | 51.7% | 92.2% | +65.1% | not measured | 0.55% |
| FTXL | First Trust Nasdaq Semiconductor ETF | First Trust | $1.1bn | 83.8% | 80.9% | +81.9% | not measured | 0.60% |
| SHOC | Strive U.S. Semiconductor ETF | Strive | $278m | 88.9% | 80.5% | +48.0% | not measured | 0.40% |
| EUV | Corgi Lithography & Semiconductor Photonics ETF | Corgi | $276m | 36.6% | 96.6% | first traded 174 days ago | · | 0.35% |
| SMHX | VanEck Fabless Semiconductor ETF | VanEck | $237m | 65.9% | 87.2% | +34.0% | +20.9 pts vs ACWI | 0.35% |
| CHPS | Xtrackers Semiconductor Select Equity ETF | Xtrackers | $130m | 60.9% | 84.8% | +75.8% | +62.7 pts vs ACWI | 0.15% |
| SMHC | VanEck China Semiconductor ETF | VanEck | $13m | 0.0% | 100.0% | first traded 125 days ago | · | 0.65% |

### How much of each pair is the same fund

The closest pair is SOXQ and SOXX , which hold 83% of their weight in the same companies. The furthest apart is EUV and SMHX at 4%. The middle pair of the 45 is 40%. The grid is the 10 largest of 11 funds.

| | SMH | SOXX | SOXQ | XSD | PSI | FTXL | SHOC | EUV | SMHX | CHPS |
| --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |
| SMH | · | 59% | 75% | 29% | 40% | 61% | 81% | 34% | 44% | 55% |
| SOXX | 59% | · | 83% | 39% | 47% | 78% | 64% | 24% | 36% | 65% |
| SOXQ | 75% | 83% | · | 39% | 44% | 73% | 73% | 29% | 43% | 59% |
| XSD | 29% | 39% | 39% | · | 34% | 41% | 28% | 7% | 37% | 31% |
| PSI | 40% | 47% | 44% | 34% | · | 53% | 39% | 26% | 15% | 40% |
| FTXL | 61% | 78% | 73% | 41% | 53% | · | 60% | 20% | 34% | 58% |
| SHOC | 81% | 64% | 73% | 28% | 39% | 60% | · | 25% | 43% | 57% |
| EUV | 34% | 24% | 29% | 7% | 26% | 20% | 25% | · | 4% | 18% |
| SMHX | 44% | 36% | 43% | 37% | 15% | 34% | 43% | 4% | · | 24% |
| CHPS | 55% | 65% | 59% | 31% | 40% | 58% | 57% | 18% | 24% | · |

Weight overlap adds the smaller of the two weights for every company both funds hold. Funds with a cut-short book are left out, not compared short.

### What each fund holds alone

| Fund | Largest holding it alone has | Weight | All of its own names |
| --- | --- | --- | --- |
| SOXX | SK HYNIX AMERICAN DEPOSITARY SHARE SKHY | 2.7% | 4.3% |
| XSD | UNIVERSAL DISPLAY CORP OLED | 3.0% | 18.8% |
| PSI | Cohu Inc COHU | 2.9% | 7.6% |
| FTXL | Vishay Intertechnology, Inc. VSH | 0.9% | 2.3% |
| SHOC | Keysight Technologies Inc KEYS | 0.9% | 0.9% |
| EUV | Lumentum Holdings Inc LITE | 5.0% | 33.0% |
| SMHX | Silicon Motion Technology Corp | 3.8% | 3.8% |
| CHPS | SK HYNIX INC 000660 | 6.8% | 27.0% |

### Questions people ask

How many semiconductor ETFs are there? ETFIQ covers 11 US listed semiconductor ETFs as of Oct 27, 2026. That is every one it can measure from the fund’s own published holdings. What is the largest semiconductor ETF? SMH , VanEck Semiconductor ETF, at $66.6bn in net assets as of Oct 23, 2026, the largest of the 11 semiconductor ETFs with a published size. What is the cheapest semiconductor ETF? CHPS , Xtrackers Semiconductor Select Equity ETF, at 0.15% a year by its prospectus filed Sep 25, 2026, the lowest fee of the 11 semiconductor ETFs that publish one. Which semiconductor ETF has performed best over the past year? FTXL , First Trust Nasdaq Semiconductor ETF, at +81.9% total return over the year to Oct 27, 2026, the highest of the 9 semiconductor ETFs with a full year of trading behind them. Past returns do not predict future ones. What do semiconductor ETFs hold? Funds that hold chip designers, chip makers and the companies that supply the equipment and materials they use. Between them the 11 semiconductor ETFs ETFIQ can read name 45 companies in their ten largest holdings, by holdings dated May 29, 2026 to Oct 27, 2026, most widely Advanced Micro Devices Inc, which is among the ten largest of 8 of them. Do semiconductor ETFs hold the same companies? It depends which two. Across the 45 pairs of the 10 semiconductor ETFs with a full published book, by holdings dated May 29, 2026 to Oct 27, 2026, SOXQ and SOXX hold 83% of their weight in the same companies, EUV and SMHX hold 4%, and the middle pair holds 40%. Two funds sold on one theme are not the same fund.

### What the issuers say about this theme

The issuers behind these semiconductor funds publish their own work on this theme. These are their pages and words, not ETFIQ’s. A fund company writing about a theme it sells is making a case.

| Issuer | What they publish | Kind |
| --- | --- | --- |
| VanEck | VanEck Insights | Their research index |
| iShares | iShares Portfolio Insights | Their research index |
| Invesco | Invesco insights | Their research index |
| First Trust | First Trust Investment Insights | Their research index |

### Where to next

### Sources

Links are sources, not endorsements.

ETFIQ is an independent publisher and makes no recommendations. Standards and sources

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Source: ETFIQ, independent ETF data. Recomputed nightly from public filings and prices.
Cite: ETFIQ, Semiconductor ETFs: what each one holds, data as of Oct 27, 2026. https://etfiq.com/themes/semis
Licence: https://etfiq.com/license/ Data ETFIQ computes is free to use with attribution: ETFIQ (etfiq.com). Issuer data stays under its owner's terms.
HTML: https://etfiq.com/themes/semis