{"url":"https://etfiq.com/themes/semis","section":"themes","title":"Semiconductor ETFs: 11 funds, largest first | ETFIQ","description":"ETFIQ covers 11 semiconductor ETFs. The largest are SMH ($66.6bn), SOXX ($46.4bn) and SOXQ ($2.9bn); fees run 0.15% to 0.65%, as of Oct 23 to 26, 2026.","as_of":"Oct 27, 2026","structured_data":[{"@type":"FAQPage","mainEntity":[{"@type":"Question","name":"How many semiconductor ETFs are there?","acceptedAnswer":{"@type":"Answer","text":"ETFIQ covers 11 US listed semiconductor ETFs as of Oct 27, 2026. That is every one it can measure from the fund\u2019s own published holdings."}},{"@type":"Question","name":"What is the largest semiconductor ETF?","acceptedAnswer":{"@type":"Answer","text":"SMH, VanEck Semiconductor ETF, at $66.6bn in net assets as of Oct 23, 2026, the largest of the 11 semiconductor ETFs with a published size."}},{"@type":"Question","name":"What is the cheapest semiconductor ETF?","acceptedAnswer":{"@type":"Answer","text":"CHPS, Xtrackers Semiconductor Select Equity ETF, at 0.15% a year by its prospectus filed Sep 25, 2026, the lowest fee of the 11 semiconductor ETFs that publish one."}},{"@type":"Question","name":"Which semiconductor ETF has performed best over the past year?","acceptedAnswer":{"@type":"Answer","text":"FTXL, First Trust Nasdaq Semiconductor ETF, at +81.9% total return over the year to Oct 27, 2026, the highest of the 9 semiconductor ETFs with a full year of trading behind them. Past returns do not predict future ones."}},{"@type":"Question","name":"What do semiconductor ETFs hold?","acceptedAnswer":{"@type":"Answer","text":"Funds that hold chip designers, chip makers and the companies that supply the equipment and materials they use. Between them the 11 semiconductor ETFs ETFIQ can read name 45 companies in their ten largest holdings, by holdings dated May 29, 2026 to Oct 27, 2026, most widely Advanced Micro Devices Inc, which is among the ten largest of 8 of them."}},{"@type":"Question","name":"Do semiconductor ETFs hold the same companies?","acceptedAnswer":{"@type":"Answer","text":"It depends which two. Across the 45 pairs of the 10 semiconductor ETFs with a full published book, by holdings dated May 29, 2026 to Oct 27, 2026, SOXQ and SOXX hold 83% of their weight in the same companies, EUV and SMHX hold 4%, and the middle pair holds 40%. Two funds sold on one theme are not the same fund."}}]},{"@type":"ItemList","name":"Semiconductor ETFs: 11 funds, largest first","numberOfItems":11,"itemListElement":[{"@type":"ListItem","position":1,"name":"SMH","url":"https://etfiq.com/funds/smh"},{"@type":"ListItem","position":2,"name":"SOXX","url":"https://etfiq.com/funds/soxx"},{"@type":"ListItem","position":3,"name":"SOXQ","url":"https://etfiq.com/funds/soxq"},{"@type":"ListItem","position":4,"name":"XSD","url":"https://etfiq.com/funds/xsd"},{"@type":"ListItem","position":5,"name":"PSI","url":"https://etfiq.com/funds/psi"},{"@type":"ListItem","position":6,"name":"FTXL","url":"https://etfiq.com/funds/ftxl"},{"@type":"ListItem","position":7,"name":"SHOC","url":"https://etfiq.com/funds/shoc"},{"@type":"ListItem","position":8,"name":"EUV","url":"https://etfiq.com/funds/euv"},{"@type":"ListItem","position":9,"name":"SMHX","url":"https://etfiq.com/funds/smhx"},{"@type":"ListItem","position":10,"name":"CHPS","url":"https://etfiq.com/funds/chps"},{"@type":"ListItem","position":11,"name":"SMHC","url":"https://etfiq.com/funds/smhc"}]},{"@type":"ItemList","name":"The 10 largest semiconductor ETFs","itemListOrder":"https://schema.org/ItemListOrderDescending","numberOfItems":10,"itemListElement":[{"@type":"ListItem","position":1,"name":"SMH","url":"https://etfiq.com/funds/smh"},{"@type":"ListItem","position":2,"name":"SOXX","url":"https://etfiq.com/funds/soxx"},{"@type":"ListItem","position":3,"name":"SOXQ","url":"https://etfiq.com/funds/soxq"},{"@type":"ListItem","position":4,"name":"XSD","url":"https://etfiq.com/funds/xsd"},{"@type":"ListItem","position":5,"name":"PSI","url":"https://etfiq.com/funds/psi"},{"@type":"ListItem","position":6,"name":"FTXL","url":"https://etfiq.com/funds/ftxl"},{"@type":"ListItem","position":7,"name":"SHOC","url":"https://etfiq.com/funds/shoc"},{"@type":"ListItem","position":8,"name":"EUV","url":"https://etfiq.com/funds/euv"},{"@type":"ListItem","position":9,"name":"SMHX","url":"https://etfiq.com/funds/smhx"},{"@type":"ListItem","position":10,"name":"CHPS","url":"https://etfiq.com/funds/chps"}]},{"@type":"Dataset","name":"Semiconductor ETFs: what each one holds","description":"ETFIQ covers 11 semiconductor ETFs. The largest are SMH ($66.6bn), SOXX ($46.4bn) and SOXQ ($2.9bn); fees run 0.15% to 0.65%, as of Oct 23 to 26, 2026.","url":"https://etfiq.com/themes/semis","dateModified":"2026-10-27","inLanguage":"en","creator":{"@id":"https://etfiq.com/#org"},"publisher":{"@id":"https://etfiq.com/#org"},"license":"https://etfiq.com/license/","isAccessibleForFree":true,"creativeWorkStatus":"Published","distribution":[{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/thematic.json"}],"variableMeasured":["Weight overlap with the S&P 500","Active share","Holdings","Top ten share of the fund","Total return","Fee for the differing part","Expense ratio"],"keywords":["exchange-traded funds","ETF","Thematic ETFs","fund data","SEC filings"]},{"@type":"BreadcrumbList","itemListElement":[{"@type":"ListItem","position":1,"name":"ETFIQ","item":"https://etfiq.com/"},{"@type":"ListItem","position":2,"name":"Thematic ETFs","item":"https://etfiq.com/themes/"},{"@type":"ListItem","position":3,"name":"Semiconductor","item":"https://etfiq.com/themes/semis"}]},{"@type":"WebPage","name":"Semiconductor ETFs: 11 funds, largest first","description":"ETFIQ covers 11 semiconductor ETFs. The largest are SMH ($66.6bn), SOXX ($46.4bn) and SOXQ ($2.9bn); fees run 0.15% to 0.65%, as of Oct 23 to 26, 2026.","url":"https://etfiq.com/themes/semis","dateModified":"2026-10-27","isPartOf":{"@type":"WebSite","name":"ETFIQ","url":"https://etfiq.com"},"speakable":{"@type":"SpeakableSpecification","cssSelector":[".lede",".faq"]},"publisher":{"@id":"https://etfiq.com/#org"}}],"characters":9351,"truncated":false,"content":"ETFIQ / Thematic ETFs / Semiconductor \n \n Data as of Oct 27, 2026 .\n Semiconductor ETFs: what each one holds\n See every semiconductor ETF by what it holds, not by its name. Funds that hold chip designers, chip makers and the companies that supply the equipment and materials they use. 11 funds, largest first. Updated Oct 27, 2026. The typical fund carries 66% of its weight in S&P 500 stocks, the 3rd most of the 53 themes with holdings on file.\n 11 US listed semiconductor ETFs \n $66.6bn The largest, SMH \n 0.15% The cheapest, CHPS \n +81.9% Best one year, FTXL \n\n The short answers\n Least like the S&P 500 SMHC , VanEck China Semiconductor ETF, 0.0% of its weight in S&P 500 companies. Closest pair SOXQ and SOXX , 83% of their weight in the same companies. What these funds actually own\n Between them the 11 funds' ten largest holdings name 45 companies, of which 16 appear in more than one. Advanced Micro Devices Inc is among the ten largest of 8 of them, at an average of 6.1% of the fund.\n Semiconductors ETFs, the companies their ten largest holdings name. Source: each fund's latest SEC filing or its issuer\u2019s own daily holdings file, read by ETFIQ. Company Among the ten largest of Average weight where it is Largest, and in which fund \n Advanced Micro Devices Inc AMD 8 of 11 6.1% 9.3% in SOXX \n Broadcom Inc AVGO 7 of 11 7.9% 12.5% in SMHX \n Micron Technology Inc MU 7 of 11 7.7% 13.8% in SHOC \n Texas Instruments Inc TXN 7 of 11 4.7% 6.4% in PSI \n Marvell Technology Inc MRVL 7 of 11 4.5% 5.1% in SMHX \n Nvidia Corp NVDA 6 of 11 14.5% 20.9% in SMH \n INTEL CORPORATION INTC 6 of 11 6.1% 8.3% in SOXX \n Qualcomm Inc QCOM 6 of 11 5.2% 8.4% in FTXL \n Analog Devices Inc ADI 6 of 11 4.6% 6.1% in PSI \n Lam Research Corp LRCX 4 of 11 4.5% 5.3% in EUV \n Taiwan Semiconductor Manufacturing Co L TSM 3 of 11 9.0% 12.9% in EUV \n Asml Holding Nv ASML 3 of 11 6.7% 10.6% in EUV \n Applied Materials Inc AMAT 3 of 11 5.6% 6.5% in SHOC \n KLA Corp KLAC 3 of 11 4.7% 5.1% in SHOC \n NXP SEMICONDUCTORS NV NXPI 3 of 11 3.6% 4.4% in FTXL \n \n The 15 most widely held of 45. Each row counts the ten largest holdings of each fund, so a fund missing from a row may still hold that company lower down. Weights are of the funds that name it, not of the theme.\n The 10 largest semiconductor ETFs\n ETFIQ covers 11 semiconductor ETFs. The largest are SMH ( $66.6bn ), SOXX ( $46.4bn ) and SOXQ ( $2.9bn ); fees run 0.15% to 0.65% , as of Oct 23 to 26, 2026 .\n SMH VanEck Semiconductor ETF $66.6bn 0.35% \n SOXX iShares Semiconductor ETF $46.4bn 0.33% \n SOXQ Invesco PHLX Semiconductor ETF $2.9bn 0.19% \n XSD State Street SPDR S&P Semiconductor ETF $2.5bn 0.35% \n PSI Invesco Semiconductors ETF $2.4bn 0.55% \n FTXL First Trust Nasdaq Semiconductor ETF $1.1bn 0.60% \n SHOC Strive U.S. Semiconductor ETF $278m 0.40% \n EUV Corgi Lithography & Semiconductor Photonics ETF $276m 0.35% \n SMHX VanEck Fabless Semiconductor ETF $237m 0.35% \n CHPS Xtrackers Semiconductor Select Equity ETF $130m 0.15% \n \n Semiconductor ETFs: what each one holds, as of Oct 27, 2026. Source: ETFIQ. Ticker Fund Issuer Net assets In the S&P 500 Active share Total return 1Y vs its benchmark 1Y Fee \n SMH VanEck Semiconductor ETF VanEck $66.6bn 79.3% 80.7% +55.5% +42.4 pts vs ACWI 0.35% \n SOXX iShares Semiconductor ETF iShares $46.4bn 74.5% 82.3% +68.6% +55.5 pts vs PBUS 0.33% \n SOXQ Invesco PHLX Semiconductor ETF Invesco $2.9bn 81.5% 80.8% +60.9% not measured 0.19% \n XSD State Street SPDR S&P Semiconductor ETF State Street $2.5bn 40.5% 88.6% +37.4% +23.8 pts vs IVV 0.35% \n PSI Invesco Semiconductors ETF Invesco $2.4bn 51.7% 92.2% +65.1% not measured 0.55% \n FTXL First Trust Nasdaq Semiconductor ETF First Trust $1.1bn 83.8% 80.9% +81.9% not measured 0.60% \n SHOC Strive U.S. Semiconductor ETF Strive $278m 88.9% 80.5% +48.0% not measured 0.40% \n EUV Corgi Lithography & Semiconductor Photonics ETF Corgi $276m 36.6% 96.6% first traded 174 days ago \u00b7 0.35% \n SMHX VanEck Fabless Semiconductor ETF VanEck $237m 65.9% 87.2% +34.0% +20.9 pts vs ACWI 0.35% \n CHPS Xtrackers Semiconductor Select Equity ETF Xtrackers $130m 60.9% 84.8% +75.8% +62.7 pts vs ACWI 0.15% \n SMHC VanEck China Semiconductor ETF VanEck $13m 0.0% 100.0% first traded 125 days ago \u00b7 0.65% \n \n How much of each pair is the same fund\n The closest pair is SOXQ and SOXX , which hold 83% of their weight in the same companies. The furthest apart is EUV and SMHX at 4%. The middle pair of the 45 is 40%. The grid is the 10 largest of 11 funds.\n Semiconductor ETFs, the share of each pair\u2019s weight held in the same companies. Read across or down; the number is the same either way. Cells are shaded against the closest pair here, 83%. Source: each fund\u2019s own filed or daily holdings, read by ETFIQ. SMH SOXX SOXQ XSD PSI FTXL SHOC EUV SMHX CHPS \n SMH \u00b7 59% 75% 29% 40% 61% 81% 34% 44% 55% \n SOXX 59% \u00b7 83% 39% 47% 78% 64% 24% 36% 65% \n SOXQ 75% 83% \u00b7 39% 44% 73% 73% 29% 43% 59% \n XSD 29% 39% 39% \u00b7 34% 41% 28% 7% 37% 31% \n PSI 40% 47% 44% 34% \u00b7 53% 39% 26% 15% 40% \n FTXL 61% 78% 73% 41% 53% \u00b7 60% 20% 34% 58% \n SHOC 81% 64% 73% 28% 39% 60% \u00b7 25% 43% 57% \n EUV 34% 24% 29% 7% 26% 20% 25% \u00b7 4% 18% \n SMHX 44% 36% 43% 37% 15% 34% 43% 4% \u00b7 24% \n CHPS 55% 65% 59% 31% 40% 58% 57% 18% 24% \u00b7 \n \n Weight overlap adds the smaller of the two weights for every company both funds hold. Funds with a cut-short book are left out, not compared short.\n What each fund holds alone\n Semiconductor ETFs, the largest holding no other fund in the grid holds. Source: ETFIQ. Fund Largest holding it alone has Weight All of its own names \n SOXX SK HYNIX AMERICAN DEPOSITARY SHARE SKHY 2.7% 4.3% \n XSD UNIVERSAL DISPLAY CORP OLED 3.0% 18.8% \n PSI Cohu Inc COHU 2.9% 7.6% \n FTXL Vishay Intertechnology, Inc. VSH 0.9% 2.3% \n SHOC Keysight Technologies Inc KEYS 0.9% 0.9% \n EUV Lumentum Holdings Inc LITE 5.0% 33.0% \n SMHX Silicon Motion Technology Corp 3.8% 3.8% \n CHPS SK HYNIX INC 000660 6.8% 27.0% \n \n Questions people ask\n How many semiconductor ETFs are there? ETFIQ covers 11 US listed semiconductor ETFs as of Oct 27, 2026. That is every one it can measure from the fund\u2019s own published holdings. What is the largest semiconductor ETF? SMH , VanEck Semiconductor ETF, at $66.6bn in net assets as of Oct 23, 2026, the largest of the 11 semiconductor ETFs with a published size. What is the cheapest semiconductor ETF? CHPS , Xtrackers Semiconductor Select Equity ETF, at 0.15% a year by its prospectus filed Sep 25, 2026, the lowest fee of the 11 semiconductor ETFs that publish one. Which semiconductor ETF has performed best over the past year? FTXL , First Trust Nasdaq Semiconductor ETF, at +81.9% total return over the year to Oct 27, 2026, the highest of the 9 semiconductor ETFs with a full year of trading behind them. Past returns do not predict future ones. What do semiconductor ETFs hold? Funds that hold chip designers, chip makers and the companies that supply the equipment and materials they use. Between them the 11 semiconductor ETFs ETFIQ can read name 45 companies in their ten largest holdings, by holdings dated May 29, 2026 to Oct 27, 2026, most widely Advanced Micro Devices Inc, which is among the ten largest of 8 of them. Do semiconductor ETFs hold the same companies? It depends which two. Across the 45 pairs of the 10 semiconductor ETFs with a full published book, by holdings dated May 29, 2026 to Oct 27, 2026, SOXQ and SOXX hold 83% of their weight in the same companies, EUV and SMHX hold 4%, and the middle pair holds 40%. Two funds sold on one theme are not the same fund. What the issuers say about this theme\n The issuers behind these semiconductor funds publish their own work on this theme. These are their pages and words, not ETFIQ\u2019s. A fund company writing about a theme it sells is making a case.\n Issuer material on this theme. Links leave ETFIQ. Source: each issuer\u2019s own site. Issuer What they publish Kind \n VanEck VanEck Insights Their research index \n iShares iShares Portfolio Insights Their research index \n Invesco Invesco insights Their research index \n First Trust First Trust Investment Insights Their research index \n \n Where to next\n The largest semiconductor ETFs The cheapest semiconductor ETFs The semiconductor ETFs least like the S&P 500 The semiconductor ETFs that returned most The most concentrated semiconductor ETFs Every thematic ETF Compare two funds The vocabulary Sources\n Fund holdings from SEC Form N-PORT and from the issuers\u2019 own daily files SEC EDGAR, full-text search of fund filings SEC Form N-PORT, what a fund filed it holds Rule 19a-1, what a distribution notice must say Links are sources, not endorsements.\n ETFIQ is an independent publisher and makes no recommendations. Standards and sources \n Cite this page. ETFIQ, Semiconductor ETFs: what each one holds, data as of Oct 27, 2026. https://etfiq.com/themes/semis Free to use with attribution for data ETFIQ computes; issuer data stays under its owner's terms. The underlying files are at Open data .\n Other forms Plain ETFIQ, Semiconductor ETFs: what each one holds, data as of Oct 27, 2026. https://etfiq.com/themes/semis APA ETFIQ. (Oct 27, 2026). Semiconductor ETFs: what each one holds. Retrieved from https://etfiq.com/themes/semis Markdown [Semiconductor ETFs: what each one holds (ETFIQ, Oct 27, 2026)](https://etfiq.com/themes/semis)","source":"ETFIQ, independent ETF data. Recomputed nightly from public filings and prices.","publisher":{"@id":"https://etfiq.com/#org","name":"ETFIQ","url":"https://etfiq.com"},"license":"https://etfiq.com/license/","license_text":"Data ETFIQ computes is free to use with attribution: ETFIQ (etfiq.com). Issuer data stays under its owner's terms.","citation":"ETFIQ, Semiconductor ETFs: what each one holds, data as of Oct 27, 2026. https://etfiq.com/themes/semis"}