{"url":"https://etfiq.com/rankings/themes-largest-semis","section":"rankings","title":"The largest semiconductor ETFs | ETFIQ","description":"SMH leads the largest semiconductor ETFs at $66.6bn (net assets), as of Oct 27, 2026. The largest semiconductor ETFs, ranked by net assets.","as_of":"Oct 27, 2026","structured_data":[{"@type":"ItemList","name":"The largest semiconductor ETFs","numberOfItems":11,"itemListOrder":"https://schema.org/ItemListOrderDescending","itemListElement":[{"@type":"ListItem","position":1,"name":"SMH","url":"https://etfiq.com/funds/smh"},{"@type":"ListItem","position":2,"name":"SOXX","url":"https://etfiq.com/funds/soxx"},{"@type":"ListItem","position":3,"name":"SOXQ","url":"https://etfiq.com/funds/soxq"},{"@type":"ListItem","position":4,"name":"XSD","url":"https://etfiq.com/funds/xsd"},{"@type":"ListItem","position":5,"name":"PSI","url":"https://etfiq.com/funds/psi"},{"@type":"ListItem","position":6,"name":"FTXL","url":"https://etfiq.com/funds/ftxl"},{"@type":"ListItem","position":7,"name":"SHOC","url":"https://etfiq.com/funds/shoc"},{"@type":"ListItem","position":8,"name":"EUV","url":"https://etfiq.com/funds/euv"},{"@type":"ListItem","position":9,"name":"SMHX","url":"https://etfiq.com/funds/smhx"},{"@type":"ListItem","position":10,"name":"CHPS","url":"https://etfiq.com/funds/chps"},{"@type":"ListItem","position":11,"name":"SMHC","url":"https://etfiq.com/funds/smhc"}]},{"@type":"Dataset","name":"The largest semiconductor ETFs","description":"SMH leads the largest semiconductor ETFs at $66.6bn (net assets), as of Oct 27, 2026. The largest semiconductor ETFs, ranked by net assets.","url":"https://etfiq.com/rankings/themes-largest-semis","dateModified":"2026-10-27","creator":{"@id":"https://etfiq.com/#org"},"license":"https://etfiq.com/license/","isAccessibleForFree":true,"creditText":"ETFIQ (etfiq.com)","publisher":{"@id":"https://etfiq.com/#org"},"inLanguage":"en","creativeWorkStatus":"Published","distribution":[{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/thematic.json"}],"variableMeasured":["Weight overlap with the S&P 500","Active share","Holdings","Top ten share of the fund","Total return","Fee for the differing part","Expense ratio"],"keywords":["exchange-traded funds","ETF","Thematic ETFs","fund data","SEC filings"]},{"@type":"BreadcrumbList","itemListElement":[{"@type":"ListItem","position":1,"name":"ETFIQ","item":"https://etfiq.com/"},{"@type":"ListItem","position":2,"name":"Rankings","item":"https://etfiq.com/rankings/"},{"@type":"ListItem","position":3,"name":"The largest semiconductor ETFs","item":"https://etfiq.com/rankings/themes-largest-semis"}]},{"@type":"WebPage","name":"The largest semiconductor ETFs","description":"SMH leads the largest semiconductor ETFs at $66.6bn (net assets), as of Oct 27, 2026. The largest semiconductor ETFs, ranked by net assets.","url":"https://etfiq.com/rankings/themes-largest-semis","dateModified":"2026-10-27","isPartOf":{"@type":"WebSite","name":"ETFIQ","url":"https://etfiq.com"},"speakable":{"@type":"SpeakableSpecification","cssSelector":[".lede"]},"publisher":{"@id":"https://etfiq.com/#org"}}],"characters":3215,"truncated":false,"content":"ETFIQ / Rankings / The largest semiconductor ETFs \n \n As of Oct 27, 2026 . Rebuilt every trading night.\n The largest semiconductor ETFs\n See 11 funds ranked by net assets. Updated Oct 27, 2026. Every fund here is sold on semiconductor. The column beside the size shows how much of each the S&P 500 already holds.\n The largest semiconductor ETFs, ranked by net assets, as of Oct 27, 2026. Source: ETFIQ. # Ticker Fund Net assets Weight in S&P 500 companies Total return, 1Y Fee Source \n 1 SMH VanEck Semiconductor ETF $66.6bn 79.3% +55.5% 0.35% ETFIQ, shares \u00d7 NAV, Oct 23, 2026 \n 2 SOXX iShares Semiconductor ETF $46.4bn 74.5% +68.6% 0.33% Issuer daily, Oct 26, 2026 \n 3 SOXQ Invesco PHLX Semiconductor ETF $2.9bn 81.5% +60.9% 0.19% Issuer page, Oct 26, 2026 \n 4 XSD State Street SPDR S&P Semiconductor ETF $2.5bn 40.5% +37.4% 0.35% Issuer daily, Oct 26, 2026 \n 5 PSI Invesco Semiconductors ETF $2.4bn 51.7% +65.1% 0.55% Issuer page, Oct 26, 2026 \n 6 FTXL First Trust Nasdaq Semiconductor ETF $1.1bn 83.8% +81.9% 0.60% Issuer page, Oct 26, 2026 \n 7 SHOC Strive U.S. Semiconductor ETF $278m 88.9% +48.0% 0.40% SEC filing, Jun 30, 2026 \n 8 EUV Corgi Lithography & Semiconductor Photon $276m 36.6% too new 0.35% Issuer daily, Oct 27, 2026 \n 9 SMHX VanEck Fabless Semiconductor ETF $237m 65.9% +34.0% 0.35% ETFIQ, shares \u00d7 NAV, Oct 23, 2026 \n 10 CHPS Xtrackers Semiconductor Select Equity ET $130m 60.9% +75.8% 0.15% Issuer page, Oct 26, 2026 \n 11 SMHC VanEck China Semiconductor ETF $13m 0.0% too new 0.65% ETFIQ, shares \u00d7 NAV, Oct 23, 2026 \n \n Method\n The 11 ETFs in the semiconductors theme, of which 11 publish net assets, ranked on the most recent number for each. Across the funds listed here the weight held in S&P 500 companies runs from 0.0% to 88.9%. Size shows where the money is, not what a fund did. The list sorts one published number, with no scoring or weighting. Every fund ETFIQ covers in this category is eligible, closed funds included.\n Where to next\n Every semiconductor ETF and what it holds The thematic ETFs least like the S&P 500 Sources\n Fund holdings from SEC Form N-PORT and from the issuers\u2019 own daily files SEC EDGAR, full-text search of fund filings SEC Form N-PORT, what a fund filed it holds Rule 19a-1, what a distribution notice must say Links are sources, not endorsements.\n A ranking is not a recommendation or an opinion. ETFIQ is an independent publisher, not an adviser. Standards and sources \n Cite this page. ETFIQ, The largest semiconductor ETFs, ranked by net assets, data as of Oct 27, 2026. https://etfiq.com/rankings/themes-largest-semis Free to use with attribution for data ETFIQ computes; issuer data stays under its owner's terms. The underlying files are at Open data .\n Other forms Plain ETFIQ, The largest semiconductor ETFs, ranked by net assets, data as of Oct 27, 2026. https://etfiq.com/rankings/themes-largest-semis APA ETFIQ. (Oct 27, 2026). The largest semiconductor ETFs, ranked by net assets. Retrieved from https://etfiq.com/rankings/themes-largest-semis Markdown [The largest semiconductor ETFs, ranked by net assets (ETFIQ, Oct 27, 2026)](https://etfiq.com/rankings/themes-largest-semis)","source":"ETFIQ, independent ETF data. Recomputed nightly from public filings and prices.","publisher":{"@id":"https://etfiq.com/#org","name":"ETFIQ","url":"https://etfiq.com"},"license":"https://etfiq.com/license/","license_text":"Data ETFIQ computes is free to use with attribution: ETFIQ (etfiq.com). Issuer data stays under its owner's terms.","citation":"ETFIQ, The largest semiconductor ETFs, ranked by net assets, data as of Oct 27, 2026. https://etfiq.com/rankings/themes-largest-semis"}