# Semiconductor ETFs: 11 Ranked by Fee, Nov 2026

> 11 semiconductor ETFs ranked by fee, as of Nov 4, 2026. CHPS leads at 0.15% a year. SOXQ is second at 0.19% a year. Rebuilt every trading night.

Data as of Nov 4, 2026. Rebuilt every trading night.

As of Nov 4, 2026 . Rebuilt every trading night.

## The cheapest semiconductor ETFs

See 11 funds ranked by the annual fee the fund charges. Updated Nov 4, 2026. A fee is one fact, not a verdict. Funds on one theme can hold different companies, and the holdings are on the theme page.

| # | Ticker | Fund | Fee | Net assets | Weight in S&P 500 companies | Total return, 1Y |
| --- | --- | --- | --- | --- | --- | --- |
| 1 | CHPS | Xtrackers Semiconductor Select Equity ET | 0.15% | $127m | 58.8% | +59.9% |
| 2 | SOXQ | Invesco PHLX Semiconductor ETF | 0.19% | $2.8bn | 81.4% | +47.7% |
| 3 | SOXX | iShares Semiconductor ETF | 0.33% | $44.3bn | 73.2% | +52.5% |
| 4 | EUV | Corgi Lithography & Semiconductor Photon | 0.35% | $245m | 35.5% | too new |
| 5 | SMH | VanEck Semiconductor ETF | 0.35% | $67.3bn | 78.8% | +43.4% |
| 6 | SMHX | VanEck Fabless Semiconductor ETF | 0.35% | $241m | 66.4% | +27.1% |
| 7 | XSD | State Street SPDR S&P Semiconductor ETF | 0.35% | $2.4bn | 40.2% | +34.9% |
| 8 | SHOC | Strive U.S. Semiconductor ETF | 0.40% | $278m | 88.9% | +35.7% |
| 9 | PSI | Invesco Semiconductors ETF | 0.55% | $2.2bn | 50.9% | +50.0% |
| 10 | FTXL | First Trust Nasdaq Semiconductor ETF | 0.60% | $1.1bn | 82.9% | +66.7% |
| 11 | SMHC | VanEck China Semiconductor ETF | 0.65% | $11m | 0.0% | too new |

### Method

The 11 of 11 ETFs in the semiconductors theme that publish an expense ratio, cheapest first. Across the funds listed here the annual fee runs from 0.1% to 0.7%. A fee is the one number a fund controls and the one a holder always pays. The list sorts one published number, with no scoring or weighting. Every fund ETFIQ covers in this category is eligible, closed funds included.

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### Sources

Links are sources, not endorsements.

A ranking is not a recommendation or an opinion. ETFIQ is an independent publisher, not an adviser. Standards and sources

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Source: ETFIQ, independent ETF data. Recomputed nightly from public filings and prices.
Cite: ETFIQ, The cheapest semiconductor ETFs, ranked by the annual fee the fund charges, data as of Nov 4, 2026. https://etfiq.com/rankings/themes-cheapest-semis
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