{"url":"https://etfiq.com/rankings/themes-cheapest-semis","section":"rankings","title":"Semiconductor ETFs: 11 Ranked by Fee, Nov 2026 | ETFIQ","description":"11 semiconductor ETFs ranked by fee, as of Nov 4, 2026. CHPS leads at 0.15% a year. SOXQ is second at 0.19% a year. Rebuilt every trading night.","as_of":"Nov 4, 2026","structured_data":[{"@type":"ItemList","name":"The cheapest semiconductor ETFs","numberOfItems":11,"itemListOrder":"https://schema.org/ItemListOrderDescending","itemListElement":[{"@type":"ListItem","position":1,"name":"CHPS","url":"https://etfiq.com/funds/chps"},{"@type":"ListItem","position":2,"name":"SOXQ","url":"https://etfiq.com/funds/soxq"},{"@type":"ListItem","position":3,"name":"SOXX","url":"https://etfiq.com/funds/soxx"},{"@type":"ListItem","position":4,"name":"EUV","url":"https://etfiq.com/funds/euv"},{"@type":"ListItem","position":5,"name":"SMH","url":"https://etfiq.com/funds/smh"},{"@type":"ListItem","position":6,"name":"SMHX","url":"https://etfiq.com/funds/smhx"},{"@type":"ListItem","position":7,"name":"XSD","url":"https://etfiq.com/funds/xsd"},{"@type":"ListItem","position":8,"name":"SHOC","url":"https://etfiq.com/funds/shoc"},{"@type":"ListItem","position":9,"name":"PSI","url":"https://etfiq.com/funds/psi"},{"@type":"ListItem","position":10,"name":"FTXL","url":"https://etfiq.com/funds/ftxl"},{"@type":"ListItem","position":11,"name":"SMHC","url":"https://etfiq.com/funds/smhc"}]},{"@type":"Dataset","name":"The cheapest semiconductor ETFs","description":"11 semiconductor ETFs ranked by fee, as of Nov 4, 2026. CHPS leads at 0.15% a year. SOXQ is second at 0.19% a year. Rebuilt every trading night.","url":"https://etfiq.com/rankings/themes-cheapest-semis","dateModified":"2026-11-04","creator":{"@id":"https://etfiq.com/#org"},"license":"https://etfiq.com/license/","isAccessibleForFree":true,"creditText":"ETFIQ (etfiq.com)","publisher":{"@id":"https://etfiq.com/#org"},"inLanguage":"en","creativeWorkStatus":"Published","distribution":[{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/thematic.json"}],"variableMeasured":["Weight overlap with the S&P 500","Active share","Holdings","Top ten share of the fund","Total return","Fee for the differing part","Expense ratio"],"keywords":["exchange-traded funds","ETF","Thematic ETFs","fund data","SEC filings"]},{"@type":"BreadcrumbList","itemListElement":[{"@type":"ListItem","position":1,"name":"ETFIQ","item":"https://etfiq.com/"},{"@type":"ListItem","position":2,"name":"Rankings","item":"https://etfiq.com/rankings/"},{"@type":"ListItem","position":3,"name":"The cheapest semiconductor ETFs","item":"https://etfiq.com/rankings/themes-cheapest-semis"}]},{"@type":"WebPage","name":"Semiconductor ETFs: 11 Ranked by Fee, Nov 2026","description":"11 semiconductor ETFs ranked by fee, as of Nov 4, 2026. CHPS leads at 0.15% a year. SOXQ is second at 0.19% a year. Rebuilt every trading night.","url":"https://etfiq.com/rankings/themes-cheapest-semis","dateModified":"2026-11-04","isPartOf":{"@type":"WebSite","name":"ETFIQ","url":"https://etfiq.com"},"speakable":{"@type":"SpeakableSpecification","cssSelector":[".lede"]},"publisher":{"@id":"https://etfiq.com/#org"}}],"characters":2996,"truncated":false,"content":"ETFIQ / Rankings / The cheapest semiconductor ETFs \n \n As of Nov 4, 2026 . Rebuilt every trading night.\n The cheapest semiconductor ETFs\n See 11 funds ranked by the annual fee the fund charges. Updated Nov 4, 2026. A fee is one fact, not a verdict. Funds on one theme can hold different companies, and the holdings are on the theme page.\n The cheapest semiconductor ETFs, ranked by the annual fee the fund charges, as of Nov 4, 2026. Source: ETFIQ. # Ticker Fund Fee Net assets Weight in S&P 500 companies Total return, 1Y \n 1 CHPS Xtrackers Semiconductor Select Equity ET 0.15% $127m 58.8% +59.9% \n 2 SOXQ Invesco PHLX Semiconductor ETF 0.19% $2.8bn 81.4% +47.7% \n 3 SOXX iShares Semiconductor ETF 0.33% $44.3bn 73.2% +52.5% \n 4 EUV Corgi Lithography & Semiconductor Photon 0.35% $245m 35.5% too new \n 5 SMH VanEck Semiconductor ETF 0.35% $67.3bn 78.8% +43.4% \n 6 SMHX VanEck Fabless Semiconductor ETF 0.35% $241m 66.4% +27.1% \n 7 XSD State Street SPDR S&P Semiconductor ETF 0.35% $2.4bn 40.2% +34.9% \n 8 SHOC Strive U.S. Semiconductor ETF 0.40% $278m 88.9% +35.7% \n 9 PSI Invesco Semiconductors ETF 0.55% $2.2bn 50.9% +50.0% \n 10 FTXL First Trust Nasdaq Semiconductor ETF 0.60% $1.1bn 82.9% +66.7% \n 11 SMHC VanEck China Semiconductor ETF 0.65% $11m 0.0% too new \n \n Method\n The 11 of 11 ETFs in the semiconductors theme that publish an expense ratio, cheapest first. Across the funds listed here the annual fee runs from 0.1% to 0.7%. A fee is the one number a fund controls and the one a holder always pays. The list sorts one published number, with no scoring or weighting. Every fund ETFIQ covers in this category is eligible, closed funds included.\n Where to next\n Every semiconductor ETF and what it holds The largest semiconductor ETFs Sources\n Fund holdings from SEC Form N-PORT and from the issuers\u2019 own daily files SEC EDGAR, full-text search of fund filings SEC Form N-PORT, what a fund filed it holds Rule 19a-1, what a distribution notice must say Links are sources, not endorsements.\n A ranking is not a recommendation or an opinion. ETFIQ is an independent publisher, not an adviser. Standards and sources \n Cite this page. ETFIQ, The cheapest semiconductor ETFs, ranked by the annual fee the fund charges, data as of Nov 4, 2026. https://etfiq.com/rankings/themes-cheapest-semis Free to use with attribution for data ETFIQ computes; issuer data stays under its owner's terms. The underlying files are at Open data .\n Other forms Plain ETFIQ, The cheapest semiconductor ETFs, ranked by the annual fee the fund charges, data as of Nov 4, 2026. https://etfiq.com/rankings/themes-cheapest-semis APA ETFIQ. (Nov 4, 2026). The cheapest semiconductor ETFs, ranked by the annual fee the fund charges. Retrieved from https://etfiq.com/rankings/themes-cheapest-semis Markdown [The cheapest semiconductor ETFs, ranked by the annual fee the fund charges (ETFIQ, Nov 4, 2026)](https://etfiq.com/rankings/themes-cheapest-semis)","source":"ETFIQ, independent ETF data. Recomputed nightly from public filings and prices.","publisher":{"@id":"https://etfiq.com/#org","name":"ETFIQ","url":"https://etfiq.com"},"license":"https://etfiq.com/license/","license_text":"Data ETFIQ computes is free to use with attribution: ETFIQ (etfiq.com). Issuer data stays under its owner's terms.","citation":"ETFIQ, The cheapest semiconductor ETFs, ranked by the annual fee the fund charges, data as of Nov 4, 2026. https://etfiq.com/rankings/themes-cheapest-semis"}