# ACLS ETFs: 104 Funds That Hold Axcelis Technologies

> 104 thematic and core ETFs hold Axcelis Technologies Inc (ACLS). TINY holds the most, at 3.59% of the fund on Nov 3, 2026.

Data as of Nov 5, 2026. Rebuilt every trading night.

## ETFs that hold Axcelis Technologies Inc

104 thematic and core ETFs hold Axcelis Technologies Inc , by holdings dated Jun 30, 2026 to Nov 3, 2026 . TINY holds the most, at 3.59% of the fund on Nov 3, 2026 . The next largest are PSCT (1.36%) and SPIT (1.20%).

1 single-stock and leveraged fund and 1 income and other fund on it are listed below.

### Thematic and core funds that hold it

| Fund | Name | Share of the fund | Holdings filed | Asset |
| --- | --- | --- | --- | --- |
| TINY | ProShares Nanotechnology ETF | 3.59% | Nov 3, 2026 | Equity |
| PSCT | Invesco S&P SmallCap Information Technology ETF | 1.36% | Nov 3, 2026 | Equity |
| SPIT | F/m Emerald Special Situations ETF | 1.20% | Aug 31, 2026 | Equity |
| FLQS | Franklin U.S. Small Cap Multifactor Index ETF | 0.79% | Jun 30, 2026 | Equity |
| JSML | Janus Henderson Small Cap Growth Alpha ETF | 0.66% | Jul 31, 2026 | Equity |
| FFSM | Fidelity Fundamental Small-Mid Cap ETF | 0.63% | Jul 31, 2026 | Equity |
| NIXT | Research Affiliates Deletions ETF | 0.63% | Jun 30, 2026 | Equity |
| XSHQ | Invesco S&P SmallCap Quality ETF | 0.63% | Nov 3, 2026 | Equity |
| PSC | Principal U.S. Small-Cap ETF | 0.55% | Jun 30, 2026 | Equity |
| AFSM | First Trust Active Factor Small Cap ETF | 0.42% | Nov 3, 2026 | Equity |
| IVSS | Applied Finance IVS US SMID ETF | 0.41% | Jun 30, 2026 | Equity |
| AFMC | First Trust Active Factor Mid Cap ETF | 0.40% | Nov 3, 2026 | Equity |
| EES | WisdomTree U.S. SmallCap Fund | 0.35% | Jun 30, 2026 | Equity |
| FESC | First Eagle Small Cap Equity ETF | 0.33% | Jul 31, 2026 | Equity |
| ROSC | Hartford Multifactor Small Cap ETF | 0.32% | Jul 31, 2026 | Equity |
| VIOG | Vanguard S&P Small-Cap 600 Growth ETF | 0.32% | Sep 30, 2026 | Equity |
| RESM | Columbia Research Enhanced Small Cap ETF | 0.30% | Jun 30, 2026 | Equity |
| RFLR | Innovator U.S. Small Cap Managed Floor ETF | 0.27% | Jul 31, 2026 | Equity |
| VTWG | Vanguard Russell 2000 Growth ETF | 0.27% | Sep 30, 2026 | Equity |
| USVM | VictoryShares US Small Mid Cap Value Momentum ETF | 0.25% | Jun 30, 2026 | Equity |
| TPSC | Timothy Plan US Small Cap Core ETF | 0.25% | Jun 30, 2026 | Equity |
| STXK | Strive Small-Cap ETF | 0.24% | Jun 30, 2026 | Equity |
| VIOO | Vanguard S&P Small-Cap 600 ETF | 0.23% | Sep 30, 2026 | Equity |
| IJT | iShares S&P Small-Cap 600 Growth ETF | 0.23% | Nov 3, 2026 | Equity |
| OASC | OneAscent Enhanced Small and Mid Cap ETF | 0.23% | Aug 31, 2026 | Equity |
| SLYG | State Street SPDR S & P 600 Small Cap Growth ETF | 0.23% | Nov 3, 2026 | Equity |
| IWO | iShares Russell 2000 Growth ETF | 0.21% | Nov 3, 2026 | Equity |
| XJR | iShares ESG Select Screened S&P Small-Cap ETF | 0.19% | Nov 3, 2026 | Equity |
| AVSC | Avantis U.S. Small Cap Equity ETF | 0.19% | Nov 2, 2026 | Equity |
| FYC | First Trust Small Cap Growth AlphaDEX Fund | 0.19% | Nov 3, 2026 | Equity |
| QVMS | Invesco S&P SmallCap 600 QVM Multi-factor ETF | 0.19% | Nov 3, 2026 | Equity |
| SPSM | State Street SPDR Portfolio S&P 600 Small Cap ETF | 0.17% | Nov 3, 2026 | Equity |
| IJR | iShares Core S&P Small-Cap ETF | 0.17% | Nov 3, 2026 | Equity |
| BKSE | BNY Mellon US Small Cap Core Equity ETF | 0.17% | Jul 31, 2026 | Equity |
| BULD | Pacer BlueStar Engineering the Future ETF | 0.17% | Jul 31, 2026 | Equity |
| SEIS | SEI Select Small Cap ETF | 0.17% | Jun 30, 2026 | Equity |
| VIOV | Vanguard S&P Small-Cap 600 Value ETF | 0.16% | Sep 30, 2026 | Equity |
| PRFZ | Invesco RAFI US 1500 Small-Mid ETF | 0.15% | Nov 3, 2026 | Equity |
| SQLT | iShares MSCI USA Small-Cap Quality Factor ETF | 0.15% | Nov 3, 2026 | Equity |
| FESM | Fidelity Enhanced Small Cap Core ETF | 0.15% | Jun 30, 2026 | Equity |
| KBFR | Innovator U.S. Small Cap Managed 10 Buffer ETF | 0.14% | Jul 31, 2026 | Equity |
| FSMD | Fidelity Small-Mid Multifactor ETF | 0.14% | Jul 31, 2026 | Equity |
| VTWO | Vanguard Russell 2000 ETF | 0.14% | Sep 30, 2026 | Equity |
| ACSG | American Century Small Cap Growth Insights ETF | 0.13% | Aug 31, 2026 | Equity |
| RSSL | Global X Russell 2000 ETF | 0.13% | Jul 31, 2026 | Equity |
| SMDX | Intech S&P Small-Mid Cap Diversified Alpha ETF | 0.13% | Jul 31, 2026 | Equity |
| BBSC | JPMorgan BetaBuilders U.S. Small Cap Equity ETF | 0.12% | Nov 3, 2026 | Equity |
| IJS | iShares S&P Small-Cap 600 Value ETF | 0.12% | Nov 3, 2026 | Equity |
| SLYV | State Street SPDR S & P 600 Small Cap Value ETF | 0.12% | Nov 3, 2026 | Equity |
| JSTC | Adasina Social Justice All Cap Global ETF | 0.11% | Aug 31, 2026 | Equity |
| FSML | FRANKLIN SMALL CAP ENHANCED ETF | 0.11% | Jun 30, 2026 | Equity |
| EBIT | Harbor Small Cap Earners ETF | 0.11% | Jul 31, 2026 | Equity |
| IWM | iShares Russell 2000 ETF | 0.10% | Nov 3, 2026 | Equity |
| FNDA | Schwab Fundamental U.S. Small Company ETF | 0.10% | Aug 31, 2026 | Equity |
| RUSC | Russell Investments U.S. Small Cap Equity ETF | 0.10% | Jun 30, 2026 | Equity |
| DFAS | U.S. Small Cap Portfolio: ETF Class Shares | 0.09% | Jul 31, 2026 | Equity |
| FSCC | Federated Hermes MDT Small Cap Core ETF | 0.09% | Aug 31, 2026 | Equity |
| OMFS | Invesco Russell 2000 Dynamic Multifactor ETF | 0.09% | Nov 3, 2026 | Equity |
| VBR | Vanguard Morningstar Small-Cap Value ETF | 0.09% | Sep 30, 2026 | Equity |
| GSSC | GS ActiveBeta U.S. Small Cap Equity ETF | 0.09% | Aug 31, 2026 | Equity |
| FSEG | Fidelity Enhanced Small Cap Growth ETF | 0.09% | Jun 30, 2026 | Equity |
| SMLF | iShares U.S. Small-Cap Equity Factor ETF | 0.09% | Nov 3, 2026 | Equity |
| JPSE | JPMorgan Diversified Return U.S. Small Cap Equity ETF | 0.08% | Nov 3, 2026 | Equity |
| SCHA | Schwab U.S. Small-Cap ETF | 0.07% | Aug 31, 2026 | Equity |
| FTEC | Fidelity MSCI Information Technology Index ETF | 0.06% | Jul 31, 2026 | Equity |
| ISCB | | 0.06% | Jul 31, 2026 | Equity |
| VGT | Vanguard Information Tech ETF | 0.06% | Sep 30, 2026 | Equity |
| VB | Vanguard Morningstar Small-Cap ETF | 0.05% | Sep 30, 2026 | Equity |
| FYX | First Trust Small Cap Core AlphaDEX Fund | 0.05% | Nov 3, 2026 | Equity |
| ISCG | iShares Morningstar Small-Cap Growth ETF | 0.05% | Nov 3, 2026 | Equity |
| VXF | Vanguard Extended Market ETF | 0.05% | Sep 30, 2026 | Equity |
| MSML | iShares MSCI USA Small-Cap ETF | 0.05% | Nov 3, 2026 | Equity |
| RWJ | Invesco S&P SmallCap 600 Revenue ETF | 0.05% | Nov 3, 2026 | Equity |
| ISCV | iShares Morningstar Small-Cap Value ETF | 0.04% | Nov 3, 2026 | Equity |
| ESML | iShares ESG Aware MSCI USA Small-Cap ETF | 0.04% | Nov 3, 2026 | Equity |
| FAD | First Trust Multi Cap Growth AlphaDEX Fund | 0.04% | Nov 3, 2026 | Equity |
| WSML | iShares MSCI World Small-Cap ETF | 0.03% | Nov 3, 2026 | Equity |
| AVSU | Avantis Responsible U.S. Equity ETF | 0.02% | Nov 2, 2026 | Equity |
| IGM | iShares Expanded Tech Sector ETF | 0.02% | Nov 3, 2026 | Equity |
| DFSU | Dimensional US Sustainability Core 1 ETF | 0.02% | Jul 31, 2026 | Equity |
| MSSM | Morgan Stanley Pathway Small-Mid Cap Equity ETF | 0.02% | Aug 31, 2026 | Equity |
| DFAC | U.S. Core Equity 2 Portfolio ETF Class Shares | 0.01% | Jul 31, 2026 | Equity |
| DCOR | US Core Equity 1 Portfolio ETF Class Shares | 0.01% | Jul 31, 2026 | Equity |
| TILT | Northern Trust Morningstar US Market Factor Tilt ETF | 0.01% | Jul 31, 2026 | Equity |
| AVTM | Avantis Total Equity Markets ETF | 0.01% | Nov 2, 2026 | Equity |
| AVUS | Avantis U.S. Equity ETF | 0.01% | Nov 3, 2026 | Equity |
| DFUV | Dimensional US Marketwide Value ETF | 0.01% | Jul 31, 2026 | Equity |
| GTPE | Goldman Sachs MSCI World Private Equity Return Tracker ETF | 0.01% | Aug 31, 2026 | Equity |
| MMTM | State Street SPDR S&P 1500 Momentum Tilt ETF | 0.01% | Nov 3, 2026 | Equity |
| DFAU | Dimensional US Core Equity Market ETF | 0.01% | Jul 31, 2026 | Equity |
| ESGV | Vanguard ESG U.S. Stock ETF | 0.01% | Sep 30, 2026 | Equity |
| DFUS | Dimensional U.S. Equity Market ETF | 0.01% | Jul 31, 2026 | Equity |
| EBI | Longview Advantage ETF | 0.01% | Aug 31, 2026 | Equity |
| FNDB | Schwab Fundamental U.S. Broad Market ETF | 0.01% | Aug 31, 2026 | Equity |
| VLU | State Street SPDR S&P 1500 Value Tilt ETF | 0.01% | Nov 3, 2026 | Equity |
| ONEQ | Fidelity Nasdaq Composite Index ETF | 0.01% | Aug 31, 2026 | Equity |
| SCHB | Schwab U.S. Broad Market ETF | 0.01% | Aug 31, 2026 | Equity |
| SPTM | State Street SPDR Portfolio S&P 1500 Composite Stock Market ETF | 0.01% | Nov 3, 2026 | Equity |
| VTHR | Vanguard Russell 3000 ETF | 0.01% | Sep 30, 2026 | Equity |
| VTI | Vanguard Morningstar Total Stock Market ETF | 0.01% | Sep 30, 2026 | Equity |
| DFAT | U.S. Targeted Value Portfolio ETF Class Shares | Exposure as a share of each fund’s net assets, from its own book , books dated Nov 4, 2026 .

| Fund | Name | Exposure | Book dated | How |
| --- | --- | --- | --- | --- |
| ACLZ | Corgi ACLS 2x Daily ETF | 198.40% | Nov 4, 2026 | Swaps, 2x |

### Income and other funds that hold it

| Fund | Name | Share of the fund | Holdings filed | Category |
| --- | --- | --- | --- | --- |
| ITWO | ProShares Russell 2000 High Income ETF | 0.10% | Aug 31, 2026 | Income |

### What this counts

Axcelis Technologies Inc (ticker ACLS, listed in US) is matched in every holdings book ETFIQ publishes, by its ticker and name. A share of the fund is the weight its issuer published, as of the Holdings filed date. Shares, preferred shares and debt are told by each fund’s N-PORT asset type. A fund holding only the company’s debt or preferred shares is listed under them, not counted as holding its shares. Options, swaps, futures and cash do not count as holding a company: a call option on a share is not the share. Funds whose book is gross exposure, not a portfolio, are left out.

Each row shows the date the fund last filed.

Look up another company .

### Questions people ask

Which ETFs hold Axcelis Technologies Inc? 104 thematic and core ETFs hold Axcelis Technologies Inc, by holdings dated Jun 30, 2026 to Nov 3, 2026. The largest positions are TINY at 3.59% of the fund on Nov 3, 2026, PSCT at 1.36% of the fund on Nov 3, 2026 and SPIT at 1.20% of the fund on Aug 31, 2026. 1 single-stock and leveraged fund and 1 income and other fund on it are listed apart.

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Source: ETFIQ, independent ETF data. Recomputed nightly from public filings and prices.
Cite: ETFIQ, ETFs holding Axcelis Technologies Inc, data as of Nov 5, 2026. https://etfiq.com/holdings/acls/
Licence: https://etfiq.com/license/ Data ETFIQ computes is free to use with attribution: ETFIQ (etfiq.com). Issuer data stays under its owner's terms.
HTML: https://etfiq.com/holdings/acls/