{"url":"https://etfiq.com/holdings/acls/","section":"holdings","title":"ACLS ETFs: 104 Funds That Hold Axcelis Technologies | ETFIQ","description":"104 thematic and core ETFs hold Axcelis Technologies Inc (ACLS). TINY holds the most, at 3.59% of the fund on Nov 3, 2026.","as_of":"Nov 5, 2026","structured_data":[{"@type":"Dataset","@id":"https://etfiq.com/holdings/acls#data","name":"ETFs holding Axcelis Technologies Inc","description":"Every US listed ETF that holds Axcelis Technologies Inc, with each fund\u2019s published weight and filing date.","creator":{"@id":"https://etfiq.com/#org"},"isAccessibleForFree":true,"variableMeasured":["Share of fund","Holdings filing date"],"license":"https://etfiq.com/license/","publisher":{"@id":"https://etfiq.com/#org"},"inLanguage":"en","creativeWorkStatus":"Published","distribution":[{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/alternatives.json"},{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/core.json"},{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/crypto.json"},{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/funds.json"},{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/income.json"},{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/leverage.json"},{"@type":"DataDownload","encodingFormat":"application/json","contentUrl":"https://etfiq.com/data/thematic.json"}]},{"@type":"FAQPage","mainEntity":[{"@type":"Question","name":"Which ETFs hold Axcelis Technologies Inc?","acceptedAnswer":{"@type":"Answer","text":"104 thematic and core ETFs hold Axcelis Technologies Inc, by holdings dated Jun 30, 2026 to Nov 3, 2026. The largest positions are TINY at 3.59% of the fund on Nov 3, 2026, PSCT at 1.36% of the fund on Nov 3, 2026 and SPIT at 1.20% of the fund on Aug 31, 2026. 1 single-stock and leveraged fund and 1 income and other fund on it are listed apart."}}]},{"@type":"BreadcrumbList","itemListElement":[{"@type":"ListItem","position":1,"name":"ETFIQ","item":"https://etfiq.com/"},{"@type":"ListItem","position":2,"name":"Holdings","item":"https://etfiq.com/holdings/"},{"@type":"ListItem","position":3,"name":"Axcelis Technologies Inc","item":"https://etfiq.com/holdings/acls/"}]},{"@type":"WebPage","name":"ACLS ETFs: 104 Funds That Hold Axcelis Technologies","description":"104 thematic and core ETFs hold Axcelis Technologies Inc (ACLS). TINY holds the most, at 3.59% of the fund on Nov 3, 2026.","url":"https://etfiq.com/holdings/acls/","dateModified":"2026-11-04","isPartOf":{"@type":"WebSite","name":"ETFIQ","url":"https://etfiq.com"},"speakable":{"@type":"SpeakableSpecification","cssSelector":[".lede",".faq"]},"publisher":{"@id":"https://etfiq.com/#org"}}],"characters":9921,"truncated":false,"content":"ETFIQ / Holdings / Axcelis Technologies Inc \n \n ETFs that hold Axcelis Technologies Inc\n 104 thematic and core ETFs hold Axcelis Technologies Inc , by holdings dated Jun 30, 2026 to Nov 3, 2026 . TINY holds the most, at 3.59% of the fund on Nov 3, 2026 . The next largest are PSCT (1.36%) and SPIT (1.20%). \n 1 single-stock and leveraged fund and 1 income and other fund on it are listed below.\n Thematic and core funds that hold it\n Fund Name Share of the fund Holdings filed Asset \n TINY ProShares Nanotechnology ETF 3.59% Nov 3, 2026 Equity \n PSCT Invesco S&P SmallCap Information Technology ETF 1.36% Nov 3, 2026 Equity \n SPIT F/m Emerald Special Situations ETF 1.20% Aug 31, 2026 Equity \n FLQS Franklin U.S. Small Cap Multifactor Index ETF 0.79% Jun 30, 2026 Equity \n JSML Janus Henderson Small Cap Growth Alpha ETF 0.66% Jul 31, 2026 Equity \n FFSM Fidelity Fundamental Small-Mid Cap ETF 0.63% Jul 31, 2026 Equity \n NIXT Research Affiliates Deletions ETF 0.63% Jun 30, 2026 Equity \n XSHQ Invesco S&P SmallCap Quality ETF 0.63% Nov 3, 2026 Equity \n PSC Principal U.S. Small-Cap ETF 0.55% Jun 30, 2026 Equity \n AFSM First Trust Active Factor Small Cap ETF 0.42% Nov 3, 2026 Equity \n IVSS Applied Finance IVS US SMID ETF 0.41% Jun 30, 2026 Equity \n AFMC First Trust Active Factor Mid Cap ETF 0.40% Nov 3, 2026 Equity \n EES WisdomTree U.S. SmallCap Fund 0.35% Jun 30, 2026 Equity \n FESC First Eagle Small Cap Equity ETF 0.33% Jul 31, 2026 Equity \n ROSC Hartford Multifactor Small Cap ETF 0.32% Jul 31, 2026 Equity \n VIOG Vanguard S&P Small-Cap 600 Growth ETF 0.32% Sep 30, 2026 Equity \n RESM Columbia Research Enhanced Small Cap ETF 0.30% Jun 30, 2026 Equity \n RFLR Innovator U.S. Small Cap Managed Floor ETF 0.27% Jul 31, 2026 Equity \n VTWG Vanguard Russell 2000 Growth ETF 0.27% Sep 30, 2026 Equity \n USVM VictoryShares US Small Mid Cap Value Momentum ETF 0.25% Jun 30, 2026 Equity \n TPSC Timothy Plan US Small Cap Core ETF 0.25% Jun 30, 2026 Equity \n STXK Strive Small-Cap ETF 0.24% Jun 30, 2026 Equity \n VIOO Vanguard S&P Small-Cap 600 ETF 0.23% Sep 30, 2026 Equity \n IJT iShares S&P Small-Cap 600 Growth ETF 0.23% Nov 3, 2026 Equity \n OASC OneAscent Enhanced Small and Mid Cap ETF 0.23% Aug 31, 2026 Equity \n SLYG State Street SPDR S & P 600 Small Cap Growth ETF 0.23% Nov 3, 2026 Equity \n IWO iShares Russell 2000 Growth ETF 0.21% Nov 3, 2026 Equity \n XJR iShares ESG Select Screened S&P Small-Cap ETF 0.19% Nov 3, 2026 Equity \n AVSC Avantis U.S. Small Cap Equity ETF 0.19% Nov 2, 2026 Equity \n FYC First Trust Small Cap Growth AlphaDEX Fund 0.19% Nov 3, 2026 Equity \n QVMS Invesco S&P SmallCap 600 QVM Multi-factor ETF 0.19% Nov 3, 2026 Equity \n SPSM State Street SPDR Portfolio S&P 600 Small Cap ETF 0.17% Nov 3, 2026 Equity \n IJR iShares Core S&P Small-Cap ETF 0.17% Nov 3, 2026 Equity \n BKSE BNY Mellon US Small Cap Core Equity ETF 0.17% Jul 31, 2026 Equity \n BULD Pacer BlueStar Engineering the Future ETF 0.17% Jul 31, 2026 Equity \n SEIS SEI Select Small Cap ETF 0.17% Jun 30, 2026 Equity \n VIOV Vanguard S&P Small-Cap 600 Value ETF 0.16% Sep 30, 2026 Equity \n PRFZ Invesco RAFI US 1500 Small-Mid ETF 0.15% Nov 3, 2026 Equity \n SQLT iShares MSCI USA Small-Cap Quality Factor ETF 0.15% Nov 3, 2026 Equity \n FESM Fidelity Enhanced Small Cap Core ETF 0.15% Jun 30, 2026 Equity \n KBFR Innovator U.S. Small Cap Managed 10 Buffer ETF 0.14% Jul 31, 2026 Equity \n FSMD Fidelity Small-Mid Multifactor ETF 0.14% Jul 31, 2026 Equity \n VTWO Vanguard Russell 2000 ETF 0.14% Sep 30, 2026 Equity \n ACSG American Century Small Cap Growth Insights ETF 0.13% Aug 31, 2026 Equity \n RSSL Global X Russell 2000 ETF 0.13% Jul 31, 2026 Equity \n SMDX Intech S&P Small-Mid Cap Diversified Alpha ETF 0.13% Jul 31, 2026 Equity \n BBSC JPMorgan BetaBuilders U.S. Small Cap Equity ETF 0.12% Nov 3, 2026 Equity \n IJS iShares S&P Small-Cap 600 Value ETF 0.12% Nov 3, 2026 Equity \n SLYV State Street SPDR S & P 600 Small Cap Value ETF 0.12% Nov 3, 2026 Equity \n JSTC Adasina Social Justice All Cap Global ETF 0.11% Aug 31, 2026 Equity \n FSML FRANKLIN SMALL CAP ENHANCED ETF 0.11% Jun 30, 2026 Equity \n EBIT Harbor Small Cap Earners ETF 0.11% Jul 31, 2026 Equity \n IWM iShares Russell 2000 ETF 0.10% Nov 3, 2026 Equity \n FNDA Schwab Fundamental U.S. Small Company ETF 0.10% Aug 31, 2026 Equity \n RUSC Russell Investments U.S. Small Cap Equity ETF 0.10% Jun 30, 2026 Equity \n DFAS U.S. Small Cap Portfolio: ETF Class Shares 0.09% Jul 31, 2026 Equity \n FSCC Federated Hermes MDT Small Cap Core ETF 0.09% Aug 31, 2026 Equity \n OMFS Invesco Russell 2000 Dynamic Multifactor ETF 0.09% Nov 3, 2026 Equity \n VBR Vanguard Morningstar Small-Cap Value ETF 0.09% Sep 30, 2026 Equity \n GSSC GS ActiveBeta U.S. Small Cap Equity ETF 0.09% Aug 31, 2026 Equity \n FSEG Fidelity Enhanced Small Cap Growth ETF 0.09% Jun 30, 2026 Equity \n SMLF iShares U.S. Small-Cap Equity Factor ETF 0.09% Nov 3, 2026 Equity \n JPSE JPMorgan Diversified Return U.S. Small Cap Equity ETF 0.08% Nov 3, 2026 Equity \n SCHA Schwab U.S. Small-Cap ETF 0.07% Aug 31, 2026 Equity \n FTEC Fidelity MSCI Information Technology Index ETF 0.06% Jul 31, 2026 Equity \n ISCB 0.06% Jul 31, 2026 Equity \n VGT Vanguard Information Tech ETF 0.06% Sep 30, 2026 Equity \n VB Vanguard Morningstar Small-Cap ETF 0.05% Sep 30, 2026 Equity \n FYX First Trust Small Cap Core AlphaDEX Fund 0.05% Nov 3, 2026 Equity \n ISCG iShares Morningstar Small-Cap Growth ETF 0.05% Nov 3, 2026 Equity \n VXF Vanguard Extended Market ETF 0.05% Sep 30, 2026 Equity \n MSML iShares MSCI USA Small-Cap ETF 0.05% Nov 3, 2026 Equity \n RWJ Invesco S&P SmallCap 600 Revenue ETF 0.05% Nov 3, 2026 Equity \n ISCV iShares Morningstar Small-Cap Value ETF 0.04% Nov 3, 2026 Equity \n ESML iShares ESG Aware MSCI USA Small-Cap ETF 0.04% Nov 3, 2026 Equity \n FAD First Trust Multi Cap Growth AlphaDEX Fund 0.04% Nov 3, 2026 Equity \n WSML iShares MSCI World Small-Cap ETF 0.03% Nov 3, 2026 Equity \n AVSU Avantis Responsible U.S. Equity ETF 0.02% Nov 2, 2026 Equity \n IGM iShares Expanded Tech Sector ETF 0.02% Nov 3, 2026 Equity \n DFSU Dimensional US Sustainability Core 1 ETF 0.02% Jul 31, 2026 Equity \n MSSM Morgan Stanley Pathway Small-Mid Cap Equity ETF 0.02% Aug 31, 2026 Equity \n DFAC U.S. Core Equity 2 Portfolio ETF Class Shares 0.01% Jul 31, 2026 Equity \n DCOR US Core Equity 1 Portfolio ETF Class Shares 0.01% Jul 31, 2026 Equity \n TILT Northern Trust Morningstar US Market Factor Tilt ETF 0.01% Jul 31, 2026 Equity \n AVTM Avantis Total Equity Markets ETF 0.01% Nov 2, 2026 Equity \n AVUS Avantis U.S. Equity ETF 0.01% Nov 3, 2026 Equity \n DFUV Dimensional US Marketwide Value ETF 0.01% Jul 31, 2026 Equity \n GTPE Goldman Sachs MSCI World Private Equity Return Tracker ETF 0.01% Aug 31, 2026 Equity \n MMTM State Street SPDR S&P 1500 Momentum Tilt ETF 0.01% Nov 3, 2026 Equity \n DFAU Dimensional US Core Equity Market ETF 0.01% Jul 31, 2026 Equity \n ESGV Vanguard ESG U.S. Stock ETF 0.01% Sep 30, 2026 Equity \n DFUS Dimensional U.S. Equity Market ETF 0.01% Jul 31, 2026 Equity \n EBI Longview Advantage ETF 0.01% Aug 31, 2026 Equity \n FNDB Schwab Fundamental U.S. Broad Market ETF 0.01% Aug 31, 2026 Equity \n VLU State Street SPDR S&P 1500 Value Tilt ETF 0.01% Nov 3, 2026 Equity \n ONEQ Fidelity Nasdaq Composite Index ETF 0.01% Aug 31, 2026 Equity \n SCHB Schwab U.S. Broad Market ETF 0.01% Aug 31, 2026 Equity \n SPTM State Street SPDR Portfolio S&P 1500 Composite Stock Market ETF 0.01% Nov 3, 2026 Equity \n VTHR Vanguard Russell 3000 ETF 0.01% Sep 30, 2026 Equity \n VTI Vanguard Morningstar Total Stock Market ETF 0.01% Sep 30, 2026 Equity \n DFAT U.S. Targeted Value Portfolio ETF Class Shares Jul 31, 2026 Equity \n SPGM State Street SPDR Portfolio MSCI Global Stock Market ETF Nov 3, 2026 Equity \n VT Vanguard Total World Stock Index ETF Sep 30, 2026 Equity \n DXUV US Vector Equity Portfolio ETF Class Shares Jul 31, 2026 Equity \n Single-stock and leveraged funds on Axcelis Technologies Inc\n Exposure as a share of each fund\u2019s net assets, from its own book , books dated Nov 4, 2026 .\n Fund Name Exposure Book dated How \n ACLZ Corgi ACLS 2x Daily ETF 198.40% Nov 4, 2026 Swaps, 2x \n Income and other funds that hold it\n Fund Name Share of the fund Holdings filed Category \n ITWO ProShares Russell 2000 High Income ETF 0.10% Aug 31, 2026 Income \n What this counts\n Axcelis Technologies Inc (ticker ACLS, listed in US) is matched in every holdings book ETFIQ publishes, by its ticker and name. A share of the fund is the weight its issuer published, as of the Holdings filed date. Shares, preferred shares and debt are told by each fund\u2019s N-PORT asset type. A fund holding only the company\u2019s debt or preferred shares is listed under them, not counted as holding its shares. Options, swaps, futures and cash do not count as holding a company: a call option on a share is not the share. Funds whose book is gross exposure, not a portfolio, are left out.\n Each row shows the date the fund last filed.\n Look up another company .\n Questions people ask\n Which ETFs hold Axcelis Technologies Inc? 104 thematic and core ETFs hold Axcelis Technologies Inc, by holdings dated Jun 30, 2026 to Nov 3, 2026. The largest positions are TINY at 3.59% of the fund on Nov 3, 2026, PSCT at 1.36% of the fund on Nov 3, 2026 and SPIT at 1.20% of the fund on Aug 31, 2026. 1 single-stock and leveraged fund and 1 income and other fund on it are listed apart. \n Cite this page. ETFIQ, ETFs holding Axcelis Technologies Inc, data as of Nov 5, 2026. https://etfiq.com/holdings/acls/ Free to use with attribution for data ETFIQ computes; issuer data stays under its owner's terms. The underlying files are at Open data .\n Other forms Plain ETFIQ, ETFs holding Axcelis Technologies Inc, data as of Nov 5, 2026. https://etfiq.com/holdings/acls/ APA ETFIQ. (Nov 5, 2026). ETFs holding Axcelis Technologies Inc. Retrieved from https://etfiq.com/holdings/acls/ Markdown [ETFs holding Axcelis Technologies Inc (ETFIQ, Nov 5, 2026)](https://etfiq.com/holdings/acls/)","source":"ETFIQ, independent ETF data. Recomputed nightly from public filings and prices.","publisher":{"@id":"https://etfiq.com/#org","name":"ETFIQ","url":"https://etfiq.com"},"license":"https://etfiq.com/license/","license_text":"Data ETFIQ computes is free to use with attribution: ETFIQ (etfiq.com). Issuer data stays under its owner's terms.","citation":"ETFIQ, ETFs holding Axcelis Technologies Inc, data as of Nov 5, 2026. https://etfiq.com/holdings/acls/"}