# EUV holdings: all 39 positions

> All 39 EUV holdings with weights, as of Oct 14, 2026. The top 3 are TSM 12.04%, ASML 10.11% and AMAT 6.03%. Download the full list as a CSV.

Data as of Oct 14, 2026. Rebuilt every trading night.

EUV held 39 positions as of Oct 14, 2026. Taiwan Semiconductor Manufacturing Co Ltd is the largest at 12.04%; the top 10 are 58.8% of the fund.

Source: Corgi (https://corgiinvest.com/api/data/holdings?ticker=EUV).

| # | Holding | Ticker | Weight |
| --- | --- | --- | --- |
| 1 | Taiwan Semiconductor Manufacturing Co Ltd | TSM | 12.04% |
| 2 | ASML Holding NV | ASML | 10.11% |
| 3 | Applied Materials Inc | AMAT | 6.03% |
| 4 | Lam Research Corp | LRCX | 5.94% |
| 5 | Lumentum Holdings Inc | LITE | 4.84% |
| 6 | KLA Corp | KLAC | 4.83% |
| 7 | Corning Inc | GLW | 4.44% |
| 8 | Marvell Technology Inc | MRVL | 3.97% |
| 9 | Coherent Corp | COHR | 3.32% |
| 10 | Ciena Corp | CIEN | 3.24% |
| 11 | MACOM Technology Solutions Holdings Inc | MTSI | 3.15% |
| 12 | Entegris Inc | ENTG | 3.03% |
| 13 | Credo Technology Group Holding Ltd | CRDO | 2.74% |
| 14 | Onto Innovation Inc | ONTO | 2.17% |
| 15 | Novanta Inc | NOVT | 2.14% |
| 16 | Viavi Solutions Inc | VIAV | 1.94% |
| 17 | FormFactor Inc | FORM | 1.83% |
| 18 | Nova Ltd | NVMI | 1.79% |
| 19 | Fabrinet | FN | 1.77% |
| 20 | Ouster Inc | OUST | 1.66% |
| 21 | AXT Inc | AXTI | 1.55% |
| 22 | Veeco Instruments Inc | VECO | 1.48% |
| 23 | PDF Solutions Inc | PDFS | 1.34% |
| 24 | Camtek Ltd/Israel | CAMT | 1.34% |
| 25 | Applied Optoelectronics Inc | AAOI | 1.24% |
| | First American Government Obligations Fund 12/01/2031 | | 1.51% |

The largest 25 of 39 positions are shown. All of them: https://etfiq.com/funds/euv/holdings/euv-holdings.csv (CSV) or https://etfiq.com/data/books/euv.json (JSON).

Fund page: https://etfiq.com/funds/euv

Cite: ETFIQ, Holdings of EUV, data as of Oct 14, 2026. https://etfiq.com/funds/euv/holdings/